Qinghua Zhu

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Macau, MO

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Patents Grantslast 30 patents

Information Patent Grant
Cluster tool apparatus and a method of controlling a cluster tool a...
- Patent number 10,134,613
- Issue date Nov 20, 2018
- Macau University of Science and Technology
- Yan Qiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimally scheduling of close-down process for single-arm cluster t...
- Patent number 10,001,772
- Issue date Jun 19, 2018
- Macau University of Science and Technology
- Naiqi Wu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Optimal one-wafer scheduling of single-arm multi-cluster tools with...
- Patent number 10,001,773
- Issue date Jun 19, 2018
- Macau University of Science and Technology
- Naiqi Wu
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
CLUSTER TOOL APPARATUS AND A METHOD OF CONTROLLING A CLUSTER TOOL A...
- Publication number 20180082878
- Publication date Mar 22, 2018
- Macau University of Science and Technology
- Yan Qiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools with...
- Publication number 20170083008
- Publication date Mar 23, 2017
- Macau University of Science and Technology
- Naiqi Wu
- G05 - CONTROLLING REGULATING
Information Patent Application
Optimally Scheduling of Close-down Process for Single-arm Cluster T...
- Publication number 20170083010
- Publication date Mar 23, 2017
- Macau University of Science and Technology
- Naiqi Wu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC