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Qiqun Zheng
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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Selective etching of low-k dielectrics
Patent number
6,897,154
Issue date
May 24, 2005
Terry Leung
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Selective etching of low-k dielectrics
Publication number
20030235993
Publication date
Dec 25, 2003
APPLIED MATERIALS, INC.
Terry Leung
H01 - BASIC ELECTRIC ELEMENTS