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last 30 patents
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Patent Grant
Electrostatic chuck and reaction chamber
Patent number
11,837,491
Issue date
Dec 5, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qiwei Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Physical vapor deposition chamber and physical vapor deposition app...
Patent number
11,732,346
Issue date
Aug 22, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Hongrui Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
PHYSICAL VAPOR DEPOSITION CHAMBER AND PHYSICAL VAPOR DEPOSITION APP...
Publication number
20220380887
Publication date
Dec 1, 2022
Beijing NAURA Microelectronics Equipment Co., Ltd.
Hongrui GUO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ELECTROSTATIC CHUCK AND REACTION CHAMBER
Publication number
20220051923
Publication date
Feb 17, 2022
Beijing NAURA Microelectronics Equipment Co., Ltd.
Qiwei HUANG
H01 - BASIC ELECTRIC ELEMENTS