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Shanghai, CN
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last 30 patents
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Patent Grant
Method for forming high aspect ratio patterning structure
Patent number
9,991,116
Issue date
Jun 5, 2018
Shanghai Huali Microelectronics Corporation
Peng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for establishing mapping relation in STI etch and controllin...
Patent number
9,666,472
Issue date
May 30, 2017
Shanghai Huali Microelectronics Corporation
Jin Xu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FORMING HIGH ASPECT RATIO PATTERNING STRUCTURE
Publication number
20180144929
Publication date
May 24, 2018
Peng Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ESTABLISHING MAPPING RELATION IN STI ETCH AND CONTROLLIN...
Publication number
20170025304
Publication date
Jan 26, 2017
Jin Xu
H01 - BASIC ELECTRIC ELEMENTS