Quan Chau

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with thermal choke
- Patent number 9,805,963
- Issue date Oct 31, 2017
- Lam Research Corporation
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lower electrode assembly of plasma processing chamber
- Patent number 9,412,555
- Issue date Aug 9, 2016
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK WITH THERMAL CHOKE
- Publication number 20170098566
- Publication date Apr 6, 2017
- LAM RESEARCH CORPORATION
- Maolin Long
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER
- Publication number 20100108261
- Publication date May 6, 2010
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS