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Quirin W. Matthys
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St. Bonifacius, MN, US
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Patents Grants
last 30 patents
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Patent Grant
Reduced footprint tool for automated processing of microelectronic...
Patent number
7,134,827
Issue date
Nov 14, 2006
FSI International, Inc.
Robert E. Larson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduced footprint tool for automated processing of microelectronic...
Patent number
6,979,165
Issue date
Dec 27, 2005
FSI International, Inc.
Robert E. Larson
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Reduced footprint tool for automated processing of microelectronic...
Publication number
20050063799
Publication date
Mar 24, 2005
Robert E. Larson
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Reduced footprint tool for automated processing of microelectronic...
Publication number
20030091410
Publication date
May 15, 2003
Robert E. Larson
H01 - BASIC ELECTRIC ELEMENTS