Qun Ying LIN

Person

Singapore, SG

People

Patents Grantslast 30 patents

Information Patent Grant
Litho scanner alignment signal improvement
- Patent number 9,034,720
- Issue date May 19, 2015
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Hui Liu
- G02 - OPTICS
Information Patent Grant
Determination of lithography tool process condition
- Patent number 8,741,511
- Issue date Jun 3, 2014
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Wenzhan Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask and method to pattern chromeless phase lithography contact hole
- Patent number 8,057,968
- Issue date Nov 15, 2011
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Monitoring structure
- Patent number 7,866,224
- Issue date Jan 11, 2011
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask and method to pattern chromeless phase lithography contact hole
- Patent number 7,655,388
- Issue date Feb 2, 2010
- Chartered Semiconductor Manufacturing, Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for dual damascene patterning with single exposure using tri...
- Patent number 7,288,366
- Issue date Oct 30, 2007
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Half tone alternating phase shift masks
- Patent number 7,014,962
- Issue date Mar 21, 2006
- Chartered Semiconductor Manufacturing, Ltd.
- Qun Ying Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Attenuation of reflecting lights by surface treatment
- Patent number 6,451,706
- Issue date Sep 17, 2002
- Chartered Semiconductor Manufacturing Ltd.
- Ron-Fu Chu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DETERMINATION OF LITHOGRAPHY TOOL PROCESS CONDITION
- Publication number 20140170539
- Publication date Jun 19, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Wenzhan ZHOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHO SCANNER ALIGNMENT SIGNAL IMPROVEMENT
- Publication number 20140050439
- Publication date Feb 20, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Hui LIU
- G02 - OPTICS
Information Patent Application
WAFERLESS MEASUREMENT RECIPE
- Publication number 20140019927
- Publication date Jan 16, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Yasri YUDHISTIRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK AND METHOD TO PATTERN CHROMELESS PHASE LITHOGRAPHY CONTACT HOLE
- Publication number 20100196805
- Publication date Aug 5, 2010
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Sia Kim TAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MONITORING STRUCTURE
- Publication number 20080127998
- Publication date Jun 5, 2008
- Chartered Semiconductor Manufacturing LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask and method to pattern chromeless phase lithography contact hole
- Publication number 20060147813
- Publication date Jul 6, 2006
- Sya Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Structure and method to fabricate a protective sidewall liner for a...
- Publication number 20060105520
- Publication date May 18, 2006
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for dual damascene patterning with single exposure using tri...
- Publication number 20050089763
- Publication date Apr 28, 2005
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Half tone alternating phase shift masks
- Publication number 20050058912
- Publication date Mar 17, 2005
- Qun Ying Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Qun Ying LIN

Person

Patents Grantslast 30 patents

Litho scanner alignment signal improvement

Determination of lithography tool process condition

Mask and method to pattern chromeless phase lithography contact hole

Monitoring structure

Mask and method to pattern chromeless phase lithography contact hole

Method for dual damascene patterning with single exposure using tri...

Half tone alternating phase shift masks

Attenuation of reflecting lights by surface treatment

Patents Applicationslast 30 patents

DETERMINATION OF LITHOGRAPHY TOOL PROCESS CONDITION

LITHO SCANNER ALIGNMENT SIGNAL IMPROVEMENT

WAFERLESS MEASUREMENT RECIPE

MASK AND METHOD TO PATTERN CHROMELESS PHASE LITHOGRAPHY CONTACT HOLE

MONITORING STRUCTURE

Mask and method to pattern chromeless phase lithography contact hole

Structure and method to fabricate a protective sidewall liner for a...

Method for dual damascene patterning with single exposure using tri...

Half tone alternating phase shift masks