Qunying Lin

Person

Singapore, SG

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for enhancing photolithography patterning
- Patent number 8,450,046
- Issue date May 28, 2013
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Moh Lung Ling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for removing radiation side lobes
- Patent number 8,048,588
- Issue date Nov 1, 2011
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Angled-wedge chrome-face wall for intensity balance of alternating...
- Patent number 8,034,543
- Issue date Oct 11, 2011
- GLOBAL FOUNDRIES Singapore Pte. Ltd.
- Gek Soon Chua
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated circuit system employing multiple exposure dummy pattern...
- Patent number 8,003,311
- Issue date Aug 23, 2011
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated circuit system employing dipole multiple exposure
- Patent number 7,926,000
- Issue date Apr 12, 2011
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated circuit system with assist feature
- Patent number 7,836,420
- Issue date Nov 16, 2010
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Angled-wedge chrome-face wall for intensity balance of alternating...
- Patent number 7,674,562
- Issue date Mar 9, 2010
- Chartered Semiconductor Manufacturing, Ltd.
- Gek Soon Chua
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shifting photolithography system
- Patent number 7,649,612
- Issue date Jan 19, 2010
- Chartered Semiconductor Manufacturing Ltd.
- Qunying Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarizing photolithography system
- Patent number 7,560,199
- Issue date Jul 14, 2009
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for contact hole unit cell formation
- Patent number 7,556,891
- Issue date Jul 7, 2009
- Chartered Semiconductor Manufacturing Ltd.
- Soon Yoeng Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to resolve line end distortion for alternating phase shift mask
- Patent number 7,445,874
- Issue date Nov 4, 2008
- Chartered Semiconductor Manufacturing, Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for phase shift assignment
- Patent number 7,421,676
- Issue date Sep 2, 2008
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Anti-reflective sidewall coated alternating phase shift mask and fa...
- Patent number 7,384,714
- Issue date Jun 10, 2008
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ANGLED-WEDGE CHROME-FACE WALL FOR INTENSITY BALANCE OF ALTERNATING...
- Publication number 20100197140
- Publication date Aug 5, 2010
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Gek Soon CHUA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR ENHANCING PHOTOLITHOGRAPHY PATTERNING
- Publication number 20090214984
- Publication date Aug 27, 2009
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Moh Lung LING
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRATED CIRCUIT SYSTEM EMPLOYING MULTIPLE EXPOSURE DUMMY PATTERN...
- Publication number 20090181551
- Publication date Jul 16, 2009
- Chartered Semiconductor Manufacturing LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRATED CIRCUIT SYSTEM WITH ASSIST FEATURE
- Publication number 20090102069
- Publication date Apr 23, 2009
- Chartered Semiconductor Manufacturing LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRATED CIRCUIT SYSTEM EMPLOYING DIPOLE MULTIPLE EXPOSURE
- Publication number 20080217726
- Publication date Sep 11, 2008
- Chartered Semiconductor Manufacturing LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHASE SHIFTING PHOTOLITHOGRAPHY SYSTEM
- Publication number 20070177121
- Publication date Aug 2, 2007
- Chartered Semiconductor Manufacturing LTD.
- Qunying Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Angled-wedge chrome-face wall for intensity balance of alternating...
- Publication number 20070128527
- Publication date Jun 7, 2007
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Gek Soon Chua
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POLARIZING PHOTOLITHOGRAPHY SYSTEM
- Publication number 20070092839
- Publication date Apr 26, 2007
- Chartered Semiconductor Manufacturing LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method to resolve line end distortion for alternating phase shift mask
- Publication number 20060099518
- Publication date May 11, 2006
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Anti-reflective sidewall coated alternating phase shift mask and fa...
- Publication number 20060088771
- Publication date Apr 27, 2006
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for contact hole unit cell formation
- Publication number 20060088770
- Publication date Apr 27, 2006
- Chartered Semiconductor Manufacturing LTD.
- Soon Yoeng Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for removing radiation side lobes
- Publication number 20060083994
- Publication date Apr 20, 2006
- Chartered Semiconductor manufacturing , Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for phase shift assignment
- Publication number 20060075376
- Publication date Apr 6, 2006
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Qunying Lin

Person

Patents Grantslast 30 patents

Methods for enhancing photolithography patterning

Method and apparatus for removing radiation side lobes

Angled-wedge chrome-face wall for intensity balance of alternating...

Integrated circuit system employing multiple exposure dummy pattern...

Integrated circuit system employing dipole multiple exposure

Integrated circuit system with assist feature

Angled-wedge chrome-face wall for intensity balance of alternating...

Phase shifting photolithography system

Polarizing photolithography system

Method and apparatus for contact hole unit cell formation

Method to resolve line end distortion for alternating phase shift mask

System and method for phase shift assignment

Anti-reflective sidewall coated alternating phase shift mask and fa...

Patents Applicationslast 30 patents

ANGLED-WEDGE CHROME-FACE WALL FOR INTENSITY BALANCE OF ALTERNATING...

METHODS FOR ENHANCING PHOTOLITHOGRAPHY PATTERNING

INTEGRATED CIRCUIT SYSTEM EMPLOYING MULTIPLE EXPOSURE DUMMY PATTERN...

INTEGRATED CIRCUIT SYSTEM WITH ASSIST FEATURE

INTEGRATED CIRCUIT SYSTEM EMPLOYING DIPOLE MULTIPLE EXPOSURE

PHASE SHIFTING PHOTOLITHOGRAPHY SYSTEM

Angled-wedge chrome-face wall for intensity balance of alternating...

POLARIZING PHOTOLITHOGRAPHY SYSTEM

Method to resolve line end distortion for alternating phase shift mask

Anti-reflective sidewall coated alternating phase shift mask and fa...

Method and apparatus for contact hole unit cell formation

Method and apparatus for removing radiation side lobes

System and method for phase shift assignment