Quyen D. Pham

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Monitoring an effluent from a chamber
- Patent number 6,592,817
- Issue date Jul 15, 2003
- Applied Materials, Inc.
- Kenneth Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for improved remote microwave plasma source for use with sub...
- Patent number 6,271,148
- Issue date Aug 7, 2001
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for improved remote microwave plasma source for use with...
- Patent number 6,026,762
- Issue date Feb 22, 2000
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER MECHANISM WITH PREHEATING FEATURES
- Publication number 20110064545
- Publication date Mar 17, 2011
- Applied Materials, Inc.
- TETSUYA ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Oxide treatment and pressure control for electrodeposition
- Publication number 20040069651
- Publication date Apr 15, 2004
- APPLIED MATERIALS, INC.
- Harald Herchen
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Apparatus for improved remote microwave plasma source for use with...
- Publication number 20010042513
- Publication date Nov 22, 2001
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...