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R. Chris Burns
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Austin, TX, US
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last 30 patents
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Patent Grant
Methods and apparatus for electron beam assisted etching at low tem...
Patent number
8,202,440
Issue date
Jun 19, 2012
KLA-Tencor Corporation
Mehran Nasser-Ghodsi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...