R. Chris Burns

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for electron beam assisted etching at low tem...
- Patent number 8,202,440
- Issue date Jun 19, 2012
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...