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Wafer coating system
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Patent number 5,281,320
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Issue date Jan 25, 1994
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Varian Associates Inc.
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Frederick T. Turner
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer coating system
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Patent number 5,024,747
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Issue date Jun 18, 1991
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Varian Associates, Inc.
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Frederick T. Turner
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer support assembly
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Patent number 4,779,877
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Issue date Oct 25, 1988
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Varian Associates, Inc.
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R. Howard Shaw
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer coating system
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Patent number 4,756,815
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Issue date Jul 12, 1988
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Varian Associates, Inc.
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Frederick T. Turner
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer coating system
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Patent number 4,647,266
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Issue date Mar 3, 1987
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Varian Associates, Inc.
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George L. Coad
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Transfer plate rotation system
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Patent number 4,548,699
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Issue date Oct 22, 1985
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Varian Associates, Inc.
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Martin A. Hutchinson
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer transfer system
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Patent number 4,311,427
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Issue date Jan 19, 1982
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Varian Associates, Inc.
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George L. Coad
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Wafer support assembly
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Patent number 4,306,731
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Issue date Dec 22, 1981
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Varian Associates, Inc.
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R. Howard Shaw
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H01 - BASIC ELECTRIC ELEMENTS