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R. Mark Johnson
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Ramona, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Extreme ultraviolet light source
Patent number
7,368,741
Issue date
May 6, 2008
Cymer, Inc.
Stephan T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source
Patent number
6,972,421
Issue date
Dec 6, 2005
Cymer, Inc.
Stephan T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Extreme ultraviolet light source
Publication number
20100176313
Publication date
Jul 15, 2010
Cymer, Inc.
Stephan T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Extreme ultraviolet light source
Publication number
20080023657
Publication date
Jan 31, 2008
Cymer, Inc.
Stephen T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Extreme ultraviolet light source
Publication number
20050230645
Publication date
Oct 20, 2005
Cymer, Inc.
Stephan T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Extreme ultraviolet light source
Publication number
20040108473
Publication date
Jun 10, 2004
Stephan T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR