R. Niall Tait

Follow

Person

Edmonton, CA

People

Patents Grantslast 30 patents

Information Patent Grant
Fabrication of a surface micromachined capacitive microphone using...
- Patent number 5,573,679
- Issue date Nov 12, 1996
- Alberta Microelectronic Centre
- Alan W. Mitchell
- B81 - MICRO-STRUCTURAL TECHNOLOGY