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Raechel Chu-Hui Tan
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San Francisco, CA, US
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last 30 patents
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Patent Grant
Mass flow control based on micro-electromechanical devices
Patent number
11,772,958
Issue date
Oct 3, 2023
Applied Materials, Inc.
Nir Merry
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
DISTURBANCE COMPENSATION FOR SUBSTRATE PROCESSING RECIPES
Publication number
20230195072
Publication date
Jun 22, 2023
Applied Materials, Inc.
Atilla Kilicarslan
G05 - CONTROLLING REGULATING
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Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING PRESSURE CHANGES I...
Publication number
20230048337
Publication date
Feb 16, 2023
Applied Materials, Inc.
Robert A. Medure
F24 - HEATING RANGES VENTILATING
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Patent Application
MASS FLOW CONTROL BASED ON MICRO-ELECTROMECHANICAL DEVICES
Publication number
20220083081
Publication date
Mar 17, 2022
Applied Materials, Inc.
Nir Merry
G05 - CONTROLLING REGULATING