Raechel Chu-Hui Tan

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San Francisco, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Disturbance compensation for substrate processing recipes
- Patent number 12,130,606
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Atilla Kilicarslan
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mass flow control based on micro-electromechanical devices
- Patent number 11,772,958
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Nir Merry
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DISTURBANCE COMPENSATION FOR SUBSTRATE PROCESSING RECIPES
- Publication number 20250004438
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Atilla Kilicarslan
- G05 - CONTROLLING REGULATING
Information Patent Application
DISTURBANCE COMPENSATION FOR SUBSTRATE PROCESSING RECIPES
- Publication number 20230195072
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Atilla Kilicarslan
- G05 - CONTROLLING REGULATING
Information Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING PRESSURE CHANGES I...
- Publication number 20230048337
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- Robert A. Medure
- F24 - HEATING RANGES VENTILATING
Information Patent Application
MASS FLOW CONTROL BASED ON MICRO-ELECTROMECHANICAL DEVICES
- Publication number 20220083081
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Nir Merry
- G05 - CONTROLLING REGULATING