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Rafael Reiter
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Vienna, AT
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Patents Grants
last 30 patents
Information
Patent Grant
Compensation of dose inhomogeneity using overlapping exposure spots
Patent number
9,495,499
Issue date
Nov 15, 2016
IMS Nanofabrication AG
Elmar Platzgummer
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Compensation of dose inhomogeneity using overlapping exposure spots
Patent number
9,443,052
Issue date
Sep 13, 2016
IMS Nanofabrication AG
Elmar Platzgummer
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Compensation of defective beamlets in a charged-particle multi-beam...
Patent number
9,269,543
Issue date
Feb 23, 2016
IMS Nanofabrication AG
Rafael Reiter
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Compensation of Dose Inhomogeneity Using Overlapping Exposure Spots
Publication number
20150347660
Publication date
Dec 3, 2015
IMS Nanofabrication AG
Elmar Platzgummer
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
COMPENSATION OF DEFECTIVE BEAMLETS IN A CHARGED-PARTICLE MULTI-BEAM...
Publication number
20150248993
Publication date
Sep 3, 2015
IMS Nanofabrication AG
Rafael Reiter
H01 - BASIC ELECTRIC ELEMENTS