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Rafal Ryszard DYLEWICZ
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VILLACH, AT
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Patents Grants
last 30 patents
Information
Patent Grant
Gas mixture including hydrogen fluoride, alcohol and an additive fo...
Patent number
11,823,892
Issue date
Nov 21, 2023
Lam Research AG
Ji Zhu
B08 - CLEANING
Information
Patent Grant
Method and apparatus for processing wafer-shaped articles
Patent number
11,195,730
Issue date
Dec 7, 2021
Lam Research AG
Rainer Obweger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for processing wafer-shaped articles
Patent number
10,490,426
Issue date
Nov 26, 2019
Lam Research AG
Rainer Obweger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduction of surface and embedded substrate charge by controlled ex...
Patent number
10,483,010
Issue date
Nov 19, 2019
Lam Research AG
Rafal Dylewicz
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
GAS MIXTURE INCLUDING HYDROGEN FLUORIDE, ALCOHOL AND AN ADDITIVE FO...
Publication number
20210391166
Publication date
Dec 16, 2021
LAM RESEARCH AG
Ji ZHU
B08 - CLEANING
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
Publication number
20200090956
Publication date
Mar 19, 2020
LAM RESEARCH AG
Rainer Obweger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCTION OF SURFACE AND EMBEDDED SUBSTRATE CHARGE BY CONTROLLED EX...
Publication number
20180068754
Publication date
Mar 8, 2018
LAM RESEARCH AG
Rafal Dylewicz
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
Publication number
20160064242
Publication date
Mar 3, 2016
LAM RESEARCH AG
Rainer OBWEGER
H01 - BASIC ELECTRIC ELEMENTS