Rahul Ahlawat

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of compensating wavelength error induced by repetition rate...
- Patent number 11,803,126
- Issue date Oct 31, 2023
- Cymer, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine detection in a gas discharge light source
- Patent number 11,754,541
- Issue date Sep 12, 2023
- Cymer, LLC
- Joshua Jon Thornes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wavelength stabilization for an optical source
- Patent number 10,816,905
- Issue date Oct 27, 2020
- Cymer, LLC
- Rahul Ahlawat
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wavelength control system for pulse-by-pulse wavelength target trac...
- Patent number 10,096,967
- Issue date Oct 9, 2018
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixture control in a gas discharge light source
- Patent number 10,090,629
- Issue date Oct 2, 2018
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixture control in a gas discharge light source
- Patent number 9,819,136
- Issue date Nov 14, 2017
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed light beam spectral feature control
- Patent number 9,785,050
- Issue date Oct 10, 2017
- Cymer, LLC
- Kevin M. O'Brien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pulsed light beam spectral feature control
- Patent number 9,772,556
- Issue date Sep 26, 2017
- Cymer, LLC
- Kevin M. O'Brien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compensation for a disturbance in an optical source
- Patent number 9,634,460
- Issue date Apr 25, 2017
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compensation for a disturbance in an optical source
- Patent number 9,261,794
- Issue date Feb 16, 2016
- Cymer, LLC
- Rahul Ahlawat
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF COMPENSATING WAVELENGTH ERROR INDUCED BY REPETITION RATE...
- Publication number 20240036475
- Publication date Feb 1, 2024
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF COMPENSATING WAVELENGTH ERROR INDUCED BY REPETITION RATE...
- Publication number 20220269181
- Publication date Aug 25, 2022
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF MODULATING A LIGHT SOURCE WAVELENGTH
- Publication number 20220231474
- Publication date Jul 21, 2022
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUORINE DETECTION IN A GAS DISCHARGE LIGHT SOURCE
- Publication number 20200340965
- Publication date Oct 29, 2020
- CYMER, LLC
- Joshua Jon Thornes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAVELENGTH CONTROL SYSTEM FOR PULSE-BY-PULSE WAVELENGTH TARGET TRAC...
- Publication number 20180159297
- Publication date Jun 7, 2018
- CYMER, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS MIXTURE CONTROL IN A GAS DISCHARGE LIGHT SOURCE
- Publication number 20170229832
- Publication date Aug 10, 2017
- CYMER, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS MIXTURE CONTROL IN A GAS DISCHARGE LIGHT SOURCE
- Publication number 20170201057
- Publication date Jul 13, 2017
- CYMER, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED LIGHT BEAM SPECTRAL FEATURE CONTROL
- Publication number 20170160638
- Publication date Jun 8, 2017
- CYMER, LLC
- Kevin M. O'Brien
- G02 - OPTICS
Information Patent Application
PULSED LIGHT BEAM SPECTRAL FEATURE CONTROL
- Publication number 20160380402
- Publication date Dec 29, 2016
- CYMER, LLC
- Kevin M. O'Brien
- G02 - OPTICS
Information Patent Application
WAVELENGTH STABILIZATION FOR AN OPTICAL SOURCE
- Publication number 20160299441
- Publication date Oct 13, 2016
- CYMER, LLC
- Rahul Ahlawat
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPENSATION FOR A DISTURBANCE IN AN OPTICAL SOURCE
- Publication number 20160161859
- Publication date Jun 9, 2016
- CYMER, LLC
- Rahul Ahlawat
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Rahul Ahlawat

Person

Patents Grantslast 30 patents

Method of compensating wavelength error induced by repetition rate...

Fluorine detection in a gas discharge light source

Wavelength stabilization for an optical source

Wavelength control system for pulse-by-pulse wavelength target trac...

Gas mixture control in a gas discharge light source

Gas mixture control in a gas discharge light source

Pulsed light beam spectral feature control

Pulsed light beam spectral feature control

Compensation for a disturbance in an optical source

Compensation for a disturbance in an optical source

Patents Applicationslast 30 patents

METHOD OF COMPENSATING WAVELENGTH ERROR INDUCED BY REPETITION RATE...

METHOD OF COMPENSATING WAVELENGTH ERROR INDUCED BY REPETITION RATE...

APPARATUS FOR AND METHOD OF MODULATING A LIGHT SOURCE WAVELENGTH

FLUORINE DETECTION IN A GAS DISCHARGE LIGHT SOURCE

WAVELENGTH CONTROL SYSTEM FOR PULSE-BY-PULSE WAVELENGTH TARGET TRAC...

GAS MIXTURE CONTROL IN A GAS DISCHARGE LIGHT SOURCE

GAS MIXTURE CONTROL IN A GAS DISCHARGE LIGHT SOURCE

PULSED LIGHT BEAM SPECTRAL FEATURE CONTROL

PULSED LIGHT BEAM SPECTRAL FEATURE CONTROL

WAVELENGTH STABILIZATION FOR AN OPTICAL SOURCE

COMPENSATION FOR A DISTURBANCE IN AN OPTICAL SOURCE