Rahul Jairath

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for polishing a semiconductor substrate wafer
- Patent number 5,688,360
- Issue date Nov 18, 1997
- National Semiconductor Corporation
- Rahul Jairath
- B08 - CLEANING
Information Patent Grant
Method and apparatus for polishing a semiconductor substrate wafer
- Patent number 5,665,656
- Issue date Sep 9, 1997
- National Semiconductor Corporation
- Rahul Jairath
- B08 - CLEANING
Information Patent Grant
Method of using additives with silica-based slurries to enhance sel...
- Patent number 5,614,444
- Issue date Mar 25, 1997
- Sematech, Inc.
- Janos Farkas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Point of use slurry dispensing system
- Patent number 5,478,435
- Issue date Dec 26, 1995
- National Semiconductor Corp.
- James J. Murphy
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL