Rainer Butsch

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Fairport, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Emulation methodology for critical dimension control in E-Beam lith...
- Patent number 5,916,716
- Issue date Jun 29, 1999
- International Business Machines Corporation
- Rainer Butsch
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for monitoring resist charging in a charged particle system
- Patent number 5,838,013
- Issue date Nov 17, 1998
- International Business Machines Corporation
- Rainer Butsch
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Correction of pattern dependent position errors in electron beam li...
- Patent number 5,798,528
- Issue date Aug 25, 1998
- International Business Machines Corporation
- Rainer Butsch
- B82 - NANO-TECHNOLOGY