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Rainer-Helmut Lebert
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Kelmis, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Method and device for producing extreme ultraviolet radiation or so...
Patent number
7,619,232
Issue date
Nov 17, 2009
XTREME Technologies GmbH
Martin Schmidt
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Irradiation device for testing objects coated with light-sensitive...
Patent number
7,378,666
Issue date
May 27, 2008
Qimonda AG
Wolf-Dieter Domke
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Reflectometer arrangement and method for determining the reflectanc...
Patent number
6,856,395
Issue date
Feb 15, 2005
AIXUV GmbH
Rainer Lebert
G01 - MEASURING TESTING
Information
Patent Grant
Device for producing an extreme ultraviolet and soft x radiation fr...
Patent number
6,788,763
Issue date
Sep 7, 2004
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Willi Neff
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and device for producing extreme ultraviolet and soft X-rays...
Patent number
6,389,106
Issue date
May 14, 2002
Fraunhoger-Gesellschaft zur Förderung der angewandten Forschung e.V.
Willi Neff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method and Device for Producing Extreme Ultraviolet Radiation or So...
Publication number
20080116400
Publication date
May 22, 2008
Martin Schmidt
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Irradiation device for testing objects coated with light-sensitive...
Publication number
20060138311
Publication date
Jun 29, 2006
Wolf-Dieter Domke
G01 - MEASURING TESTING
Information
Patent Application
Reflectometer arrangement and method for determining the reflectanc...
Publication number
20020175690
Publication date
Nov 28, 2002
Rainer Lebert
G01 - MEASURING TESTING