Rainer Hoch

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Microlithographic projection exposure apparatus and measuring devic...
- Patent number 10,345,710
- Issue date Jul 9, 2019
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring system for measuring an imaging quality of an EUV lens
- Patent number 9,494,483
- Issue date Nov 15, 2016
- Carl Zeiss SMT GmbH
- Ralf Frese
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and measuring device for a projection lens
- Patent number 9,436,095
- Issue date Sep 6, 2016
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and measuring device for a projection lens
- Patent number 8,330,935
- Issue date Dec 11, 2012
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical measuring apparatus and operating method for imaging error...
- Patent number 7,436,521
- Issue date Oct 14, 2008
- Carl Zeiss SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for wavefront measurement of an optical imaging s...
- Patent number 7,417,745
- Issue date Aug 26, 2008
- Carl Zeiss SMT AG
- Helmut Haidner
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining distortion and/or image surface
- Patent number 7,400,388
- Issue date Jul 15, 2008
- Carl Zeiss SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
- Publication number 20170082930
- Publication date Mar 23, 2017
- Carl Zeiss SMT GMBH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measuring System for Measuring an Imaging Quality of an EUV Lens
- Publication number 20150009492
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Ralf Frese
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS
- Publication number 20130120723
- Publication date May 16, 2013
- Carl Zeiss SMT GMBH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS
- Publication number 20100141912
- Publication date Jun 10, 2010
- Carl Zeiss SMT AG
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
- Publication number 20080309894
- Publication date Dec 18, 2008
- Carl Zeiss SMT AG
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
- Publication number 20070070316
- Publication date Mar 29, 2007
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical measuring apparatus and operating method for an optical ima...
- Publication number 20060119838
- Publication date Jun 8, 2006
- Carl Zeiss SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Application
Method for determining distortion and/or image surface
- Publication number 20060007429
- Publication date Jan 12, 2006
- Carl Zeiss SMT AG
- Wolfgang Emer
- G02 - OPTICS
Information Patent Application
Device and method for wavefront measurement of an optical imaging s...
- Publication number 20050007602
- Publication date Jan 13, 2005
- Carl Zeiss SMT AG
- Helmut Haidner
- G01 - MEASURING TESTING

Rainer Hoch

Person

Patents Grantslast 30 patents

Microlithographic projection exposure apparatus and measuring devic...

Measuring system for measuring an imaging quality of an EUV lens

Exposure apparatus and measuring device for a projection lens

Exposure apparatus and measuring device for a projection lens

Optical measuring apparatus and operating method for imaging error...

Device and method for wavefront measurement of an optical imaging s...

Method for determining distortion and/or image surface

Patents Applicationslast 30 patents

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...

Measuring System for Measuring an Imaging Quality of an EUV Lens

EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS

EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...

Optical measuring apparatus and operating method for an optical ima...

Method for determining distortion and/or image surface

Device and method for wavefront measurement of an optical imaging s...