Rainer Kaebsch

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Rothenstein, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for directing an electron beam onto a target position on a s...
- Patent number 6,635,884
- Issue date Oct 21, 2003
- Leica Microsystems Lithography GmbH
- Rainer Plontke
- H01 - BASIC ELECTRIC ELEMENTS