Rainer Neumann

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Kirchdorf, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for polishing disk shaped workpieces and device for carrying...
- Patent number 6,346,033
- Issue date Feb 12, 2002
- Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
- Ludwig Lamprecht
- B24 - GRINDING POLISHING
Information Patent Grant
Method and device for polishing semiconductor wafers
- Patent number 5,980,361
- Issue date Nov 9, 1999
- Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
- Paul Muller
- B24 - GRINDING POLISHING