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Rainer Schierle
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Los Altos, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Grazing and normal incidence interferometer having common reference...
Patent number
9,273,952
Issue date
Mar 1, 2016
KLA-Tencor Corporation
Dieter Mueller
G01 - MEASURING TESTING
Information
Patent Grant
Grazing and normal incidence interferometer having common reference...
Patent number
8,786,842
Issue date
Jul 22, 2014
KLA-Tencor Corporation
Dieter Muller
G01 - MEASURING TESTING
Information
Patent Grant
Systems configured to perform a non-contact method for determining...
Patent number
7,719,294
Issue date
May 18, 2010
KLA-Tencor Technologies Corp.
Amin Samsavar
G01 - MEASURING TESTING
Information
Patent Grant
Contactless charge measurement of product wafers and control of cor...
Patent number
7,538,333
Issue date
May 26, 2009
KLA-Tencor Technologies Corporation
Amin Samsavar
G01 - MEASURING TESTING
Information
Patent Grant
Contactless charge measurement of product wafers and control of cor...
Patent number
7,248,062
Issue date
Jul 24, 2007
KLA-Tencor Technologies Corp.
Amin Samsavar
G01 - MEASURING TESTING
Information
Patent Grant
Reduced coherence symmetric grazing incidence differential interfer...
Patent number
7,173,715
Issue date
Feb 6, 2007
KLA-Tencor Corporation
Dieter Mueller
G01 - MEASURING TESTING
Information
Patent Grant
Reduced coherence symmetric grazing incidence differential interfer...
Patent number
7,057,741
Issue date
Jun 6, 2006
KLA-Tencor Corporation
Dieter Mueller
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Grazing and Normal Incidence Interferometer Having Common Reference...
Publication number
20140333937
Publication date
Nov 13, 2014
Dieter Mueller
G01 - MEASURING TESTING
Information
Patent Application
Reduced coherence symmetric grazing incidence differential interfer...
Publication number
20080278732
Publication date
Nov 13, 2008
KLA-Tencor Corporation
Dieter Mueller
G01 - MEASURING TESTING
Information
Patent Application
Reduced coherence symmetric grazing incidence differential interfer...
Publication number
20060126076
Publication date
Jun 15, 2006
KLA-Tencor Corporation
Dieter Mueller
G01 - MEASURING TESTING