Rainer Targus

Follow

Person

Vaihingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Holding apparatus and method for holding a substrate
- Patent number 11,504,825
- Issue date Nov 22, 2022
- Suss MicroTec Lithography GmbH
- Thomas Grund
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Holding apparatus and method for holding a substrate
- Patent number 11,148,258
- Issue date Oct 19, 2021
- Suss MicroTec Lithography GmbH
- Thomas Grund
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for coating a substrate
- Patent number 8,353,255
- Issue date Jan 15, 2013
- Suss MicroTec Lithography GmbH
- Ralph Beyer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HOLDING APPARATUS AND METHOD FOR HOLDING A SUBSTRATE
- Publication number 20210394340
- Publication date Dec 23, 2021
- SUSS MICROTEC LITHOGRAPHY GMBH
- Thomas GRUND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLDING APPARATUS AND METHOD FOR HOLDING A SUBSTRATE
- Publication number 20190366517
- Publication date Dec 5, 2019
- SUSS MICROTEC LITHOGRAPHY GMBH
- Thomas GRUND
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Device for coating a substrate
- Publication number 20100192843
- Publication date Aug 5, 2010
- Suss MicroTec Lithography GmbH
- Ralph Beyer
- H01 - BASIC ELECTRIC ELEMENTS