Raj Dhindsa

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for controlling etch uniformity
- Patent number 8,674,255
- Issue date Mar 18, 2014
- Lam Research Corporation
- Eric Lenz
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Showerhead electrodes
- Patent number 8,268,117
- Issue date Sep 18, 2012
- Lam Research Corporation
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode assembly and plasma processing chamber utilizing thermall...
- Patent number 8,216,418
- Issue date Jul 10, 2012
- Lam Research Corporation
- Roger Patrick
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrode assembly and plasma processing chamber utilizing thermall...
- Patent number 8,187,413
- Issue date May 29, 2012
- Lam Research Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead electrode assemblies and plasma processing chambers inco...
- Patent number 8,152,954
- Issue date Apr 10, 2012
- Lam Research Corporation
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiple frequency plasma processor method and apparatus
- Patent number 7,405,521
- Issue date Jul 29, 2008
- Lam Research Corporation
- Raj Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processor with electrode responsive to multiple RF frequencies
- Patent number 7,169,256
- Issue date Jan 30, 2007
- Lam Research Corporation
- Raj Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SHOWERHEAD ELECTRODES
- Publication number 20120160941
- Publication date Jun 28, 2012
- LAM RESEARCH CORPORATION
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE ASSEMBLY AND PLASMA PROCESSING CHAMBER UTILIZING THERMALL...
- Publication number 20090236040
- Publication date Sep 24, 2009
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLIES AND PLASMA PROCESSING CHAMBERS INCO...
- Publication number 20090095424
- Publication date Apr 16, 2009
- LAM RESEARCH CORPORATION
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE ASSEMBLY AND PLASMA PROCESSING CHAMBER UTILIZING THERMALL...
- Publication number 20080308229
- Publication date Dec 18, 2008
- LAM RESEARCH CORPORATION
- Roger Patrick
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Multiple frequency plasma etch reactor
- Publication number 20050039682
- Publication date Feb 24, 2005
- Raj Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS

Raj Dhindsa

Person

Patents Grantslast 30 patents

Apparatus and method for controlling etch uniformity

Showerhead electrodes

Electrode assembly and plasma processing chamber utilizing thermall...

Electrode assembly and plasma processing chamber utilizing thermall...

Showerhead electrode assemblies and plasma processing chambers inco...

Multiple frequency plasma processor method and apparatus

Plasma processor with electrode responsive to multiple RF frequencies

Patents Applicationslast 30 patents

SHOWERHEAD ELECTRODES

ELECTRODE ASSEMBLY AND PLASMA PROCESSING CHAMBER UTILIZING THERMALL...

SHOWERHEAD ELECTRODE ASSEMBLIES AND PLASMA PROCESSING CHAMBERS INCO...

ELECTRODE ASSEMBLY AND PLASMA PROCESSING CHAMBER UTILIZING THERMALL...

Multiple frequency plasma etch reactor