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Rajan Arora
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Hillsboro, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Integrated wafer bow measurements
Patent number
11,885,750
Issue date
Jan 30, 2024
Lam Research Corporation
Rajan Arora
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for combining optical metrology with mass metro...
Patent number
10,989,652
Issue date
Apr 27, 2021
Lam Research Corporation
Ye Feng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Remote detection of plating on wafer holding apparatus
Patent number
10,416,092
Issue date
Sep 17, 2019
Lam Research Corporation
Rajan Arora
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Patents Applications
last 30 patents
Information
Patent Application
INTEGRATED WAFER BOW MEASUREMENTS
Publication number
20240094144
Publication date
Mar 21, 2024
LAM RESEARCH CORPORATION
Rajan Arora
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LARGE SPOT SPECTRAL SENSING TO CONTROL SPATIAL SETPOINTS
Publication number
20220334554
Publication date
Oct 20, 2022
LAM RESEARCH CORPORATION
Ye Feng
G05 - CONTROLLING REGULATING
Information
Patent Application
INTEGRATED WAFER BOW MEASUREMENTS
Publication number
20220074869
Publication date
Mar 10, 2022
LAM RESEARCH CORPORATION
Rajan Arora
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR COMBINING OPTICAL METROLOGY WITH MASS METRO...
Publication number
20190072482
Publication date
Mar 7, 2019
LAM RESEARCH CORPORATION
Ye Feng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
REMOTE DETECTION OF PLATING ON WAFER HOLDING APPARATUS
Publication number
20170299524
Publication date
Oct 19, 2017
LAM RESEARCH CORPORATION
Rajan Arora
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR