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Rajesh Tiwari
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Chelmsford, MA, US
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Patents Grants
last 30 patents
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Patent Grant
CMP pad conditioning assembly
Patent number
10,471,567
Issue date
Nov 12, 2019
Entegris, Inc.
Patrick Doering
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
CONDITIONER FOR CHEMICAL-MECHANICAL-PLANARIZATION PAD AND RELATED M...
Publication number
20190351527
Publication date
Nov 21, 2019
Entegris, Inc.
Rajesh TIWARI
B24 - GRINDING POLISHING
Information
Patent Application
CMP PAD CONDITIONING ASSEMBLY
Publication number
20180071891
Publication date
Mar 15, 2018
Entegris, Inc.
Patrick Doering
B24 - GRINDING POLISHING