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Patents Grants
last 30 patents
Information
Patent Grant
Method of making acoustic devices with edge corrugation
Patent number
12,225,821
Issue date
Feb 11, 2025
Skyworks Global Pte. Ltd.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing acoustic devices with improved sensitivity
Patent number
12,219,333
Issue date
Feb 4, 2025
Skyworks Solutions, Inc.
Guofeng Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multi-cavity packaging for microelectromechanical system microphones
Patent number
12,185,055
Issue date
Dec 31, 2024
Skyworks Solutions, Inc.
Guofeng Chen
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Piezoelectric microelectromechanical system microphone with optimiz...
Patent number
12,101,601
Issue date
Sep 24, 2024
Skyworks Solutions, Inc.
Guofeng Chen
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Method for producing monolithic integration of piezoelectric microm...
Patent number
12,037,239
Issue date
Jul 16, 2024
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Extension structures in piezoelectric microelectromechanical system...
Patent number
11,979,712
Issue date
May 7, 2024
Skyworks Solutions, Inc.
You Qian
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Method of making piezoelectric microphone with deflection control
Patent number
11,963,452
Issue date
Apr 16, 2024
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
Jia Jie Xia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
Patent number
11,890,643
Issue date
Feb 6, 2024
Vanguard International Semiconductor Corporation
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrode arrangement for a pMUT and pMUT transducer array
Patent number
11,813,639
Issue date
Nov 14, 2023
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
Aveek Nath Chatterjee
B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information
Patent Grant
Acoustic devices with edge corrugation
Patent number
11,818,540
Issue date
Nov 14, 2023
Skyworks Global Pte. Ltd.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resonator devices and methods of fabricating resonator devices
Patent number
11,811,390
Issue date
Nov 7, 2023
GLOBALFOUNDRIES Singapore Pte. Ltd.
You Qian
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Microphone device with single crystal piezoelectric film and method...
Patent number
11,785,852
Issue date
Oct 10, 2023
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS devices and methods of forming thereof
Patent number
11,767,217
Issue date
Sep 26, 2023
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
Ranganathan Nagarajan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
Patent number
11,759,823
Issue date
Sep 19, 2023
Vanguard International Semiconductor Corporation
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dummy electrodes for performance improvement of piezoelectric micro...
Patent number
11,716,576
Issue date
Aug 1, 2023
Skyworks Solutions, Inc.
Guofeng Chen
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Semiconductor device and method of forming a semiconductor device
Patent number
11,706,987
Issue date
Jul 18, 2023
GLOBALFOUNDRIES Singapore Pte. Ltd.
You Qian
Information
Patent Grant
Shear-mode chemical/physical sensor for liquid environment sensing...
Patent number
11,549,913
Issue date
Jan 10, 2023
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
Humberto Campanella-Pineda
G01 - MEASURING TESTING
Information
Patent Grant
Microphone device with single crystal piezoelectric film and method...
Patent number
11,527,700
Issue date
Dec 13, 2022
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
Patent number
11,498,097
Issue date
Nov 15, 2022
Vanguard International Semiconductor Corporation
Rakesh Kumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducers and methods for...
Patent number
11,329,098
Issue date
May 10, 2022
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for packaging a microelectromechanical systems device
Patent number
11,286,157
Issue date
Mar 29, 2022
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS devices and methods of forming thereof
Patent number
11,267,696
Issue date
Mar 8, 2022
VANGUARD INIERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
Ranganathan Nagarajan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acoustic resonator and filter with electrode having zig-zag edge an...
Patent number
11,233,496
Issue date
Jan 25, 2022
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microelectromechanical systems, devices, and methods for fabricatin...
Patent number
11,185,886
Issue date
Nov 30, 2021
VANGUARD INIERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
Humberto Campanella Pineda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Monolithic integration of piezoelectric micromachined ultrasonic tr...
Patent number
10,988,376
Issue date
Apr 27, 2021
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acoustic filter with packaging-defined boundary conditions and meth...
Patent number
10,892,730
Issue date
Jan 12, 2021
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Piezoelectric microphone with deflection control and method of maki...
Patent number
10,886,455
Issue date
Jan 5, 2021
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
Jia Jie Xia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Reconfigurable MEMS devices, methods of forming reconfigurable MEMS...
Patent number
10,833,650
Issue date
Nov 10, 2020
GLOBALFOUNDRIES Singapore Pte. Ltd.
Humberto Campanella Pineda
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Microelectromechanical systems packages and methods for packaging a...
Patent number
10,793,422
Issue date
Oct 6, 2020
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level encapsulation for MEMS device
Patent number
10,793,421
Issue date
Oct 6, 2020
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
Natarajan Rajasekaran
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
BULK ACOUSTIC WAVE DEVICE WITH OVERTONE MODE
Publication number
20240364298
Publication date
Oct 31, 2024
Skyworks Solutions, Inc.
Humberto Campanella-Pineda
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
OVERTONE MODE ACOUSTIC WAVE DEVICE WITH TEMPERATURE COMPENSATION LAYER
Publication number
20240364297
Publication date
Oct 31, 2024
Skyworks Solutions, Inc.
Humberto Campanella-Pineda
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
CO-LOCATED MICROELECTROMECHANICAL SYSTEM MICROPHONE AND SENSOR WITH...
Publication number
20230328426
Publication date
Oct 12, 2023
Skyworks Solutions, Inc.
Humberto Campanella-Pineda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
MICROPHONE ASSEMBLY AND PACKAGING METHODS FOR SIZE REDUCTION AND BA...
Publication number
20230283963
Publication date
Sep 7, 2023
Skyworks Solutions, Inc.
Guofeng Chen
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
MULTI-CAVITY PACKAGING FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES
Publication number
20230269524
Publication date
Aug 24, 2023
Skyworks Solutions, Inc.
Guofeng Chen
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
METHODS OF MAKING SIDE-PORT MICROELECTROMECHANICAL SYSTEM MICROPHONES
Publication number
20230269525
Publication date
Aug 24, 2023
Skyworks Solutions, Inc.
Guofeng Chen
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
CANTILEVER SENSOR WITH MODIFIED RESONANCE FREQUENCY
Publication number
20230135200
Publication date
May 4, 2023
Skyworks Solutions, Inc.
You Qian
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
METHOD OF MODIFYING A RESONANT FREQUENCY IN CANTILEVER SENSORS
Publication number
20230136347
Publication date
May 4, 2023
Skyworks Solutions, Inc.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC SENSOR WITH INCREASED SENSITIVITY AND DEVICES HAVING...
Publication number
20230125523
Publication date
Apr 27, 2023
Skyworks Solutions, Inc.
You Qian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MAKING A PIEZOELECTRIC SENSOR WITH INCREASED SENSITIVITY...
Publication number
20230130082
Publication date
Apr 27, 2023
Skyworks Solutions, Inc.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRONIC ACOUSTIC DEVICES, MEMS MICROPHONES, AND EQUALIZATION MET...
Publication number
20230121053
Publication date
Apr 20, 2023
Skyworks Solutions, Inc.
Humberto Campanella-Pineda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC MEMS MICROPHONE WITH SPRING REGION
Publication number
20230105699
Publication date
Apr 6, 2023
Skyworks Solutions, Inc.
Guofeng Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC MEMS MICROPHONE WITH CANTILEVERED SEPARATION
Publication number
20230092374
Publication date
Mar 23, 2023
Skyworks Solutions, Inc.
You Qian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ACOUSTIC DEVICE WITH CONNECTED CANTILEVER
Publication number
20230081056
Publication date
Mar 16, 2023
Skyworks Solutions, Inc.
You Qian
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
PIEZOELECTRIC MICROELECTROMECHANICAL SYSTEM MICROPHONE WITH OPTIMIZ...
Publication number
20230072672
Publication date
Mar 9, 2023
Skyworks Solutions, Inc.
Guofeng Chen
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
MICROPHONE DEVICE WITH SINGLE CRYSTAL PIEZOELECTRIC FILM AND METHOD...
Publication number
20230051656
Publication date
Feb 16, 2023
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You QIAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CANTILEVERED PIEZOELECTRIC MICROELECTROMECHANICAL SYSTEMS MICROPHONE
Publication number
20230012046
Publication date
Jan 12, 2023
Skyworks Solutions, Inc.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC MICROPHONE WITH ENHANCED ANCHOR
Publication number
20230011561
Publication date
Jan 12, 2023
Skyworks Solutions, Inc.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
EXTENSION STRUCTURES IN PIEZOELECTRIC MICROELECTROMECHANICAL SYSTEM...
Publication number
20230007405
Publication date
Jan 5, 2023
Skyworks Solutions, Inc.
You Qian
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
METHOD OF MANUFACTURING ACOUSTIC DEVICES WITH IMPROVED SENSITIVITY
Publication number
20220408208
Publication date
Dec 22, 2022
Skyworks Solutions, Inc.
Guofeng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ACOUSTIC DEVICES WITH IMPROVED SENSITIVITY
Publication number
20220402751
Publication date
Dec 22, 2022
Skyworks Solutions, Inc.
Guofeng Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DUMMY ELECTRODES FOR PERFORMANCE IMPROVEMENT OF PIEZOELECTRIC MICRO...
Publication number
20220272459
Publication date
Aug 25, 2022
Skyworks Solutions, Inc.
Guofeng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS DEVICES AND METHODS OF FORMING THEREOF
Publication number
20220144625
Publication date
May 12, 2022
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
Ranganathan NAGARAJAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING ACOUSTIC RESONATOR AND FILTER WITH ELECTRODE H...
Publication number
20220103153
Publication date
Mar 31, 2022
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FAB...
Publication number
20220048072
Publication date
Feb 17, 2022
Vanguard International Semiconductor Corporation
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE AND METHOD OF FORMING THE SAME
Publication number
20220024754
Publication date
Jan 27, 2022
Vanguard International Semiconductor Corporation
Jia Jie Xia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FAB...
Publication number
20220023915
Publication date
Jan 27, 2022
Vanguard International Semiconductor Corporation
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FAB...
Publication number
20210362189
Publication date
Nov 25, 2021
Vanguard International Semiconductor Corporation
RAKESH KUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTERCONNECTION FOR MONOLITHICALLY INTEGRATED STACKED DEVICES AND M...
Publication number
20210260623
Publication date
Aug 26, 2021
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
You QIAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING MONOLITHIC INTEGRATION OF PIEZOELECTRIC MICROM...
Publication number
20210206630
Publication date
Jul 8, 2021
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY