Ralf ARNOLD

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Beam regulating apparatus for an EUV illumination beam
- Patent number 8,853,642
- Issue date Oct 7, 2014
- Carl Zeiss SMT GmbH
- Ralf Arnold
- G02 - OPTICS
Information Patent Grant
Method of measuring a deviation of an optical surface from a target...
- Patent number 8,508,749
- Issue date Aug 13, 2013
- Carl Zeiss SMT GmbH
- Ralf Arnold
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring a deviation of an optical surface from a target...
- Patent number 8,264,695
- Issue date Sep 11, 2012
- Carl Zeiss SMT GmbH
- Ralf Arnold
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring a deviation of an optical surface from a target...
- Patent number 8,159,678
- Issue date Apr 17, 2012
- Carl Zeiss SMT GmbH
- Ralf Arnold
Information Patent Grant
Method of measuring a deviation of an optical surface from a target...
- Patent number 7,936,521
- Issue date May 3, 2011
- Carl Zeiss SMT GmbH
- Ralf Arnold
- G01 - MEASURING TESTING
Information Patent Grant
Method of manufacturing an optical element
- Patent number 7,728,987
- Issue date Jun 1, 2010
- Carl Zeiss SMT AG
- Ralf Arnold
- G01 - MEASURING TESTING
Information Patent Grant
Optical system, method of manufacturing an optical system and metho...
- Patent number 7,605,926
- Issue date Oct 20, 2009
- Carl Zeiss SMT AG
- Jochen Hetzler
- G01 - MEASURING TESTING
Information Patent Grant
Diffractive optical element
- Patent number 7,139,127
- Issue date Nov 21, 2006
- Carl Zeiss AG
- Ralf Arnold
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
BEAM REGULATING APPARATUS FOR AN EUV ILLUMINATION BEAM
- Publication number 20130248728
- Publication date Sep 26, 2013
- Carl Zeiss SMT GMBH
- Ralf Arnold
- G02 - OPTICS
Information Patent Application
METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET...
- Publication number 20120330609
- Publication date Dec 27, 2012
- Carl Zeiss SMT GMBH
- Ralf ARNOLD
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET...
- Publication number 20110141484
- Publication date Jun 16, 2011
- Carl Zeiss SMT AG
- Ralf Arnold
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET...
- Publication number 20100177320
- Publication date Jul 15, 2010
- Carl Zeiss SMT AG
- Ralf Arnold
- G01 - MEASURING TESTING
Information Patent Application
Method of Manufacturing an Optical Element
- Publication number 20080043247
- Publication date Feb 21, 2008
- Carl Zeiss SMT AG
- Ralf Arnold
- G01 - MEASURING TESTING
Information Patent Application
Diffractive optical element
- Publication number 20050207012
- Publication date Sep 22, 2005
- Ralf Arnold
- G02 - OPTICS

Ralf ARNOLD

Person

Patents Grantslast 30 patents

Beam regulating apparatus for an EUV illumination beam

Method of measuring a deviation of an optical surface from a target...

Method of measuring a deviation of an optical surface from a target...

Method of measuring a deviation of an optical surface from a target...

Method of measuring a deviation of an optical surface from a target...

Method of manufacturing an optical element

Optical system, method of manufacturing an optical system and metho...

Diffractive optical element

Patents Applicationslast 30 patents

BEAM REGULATING APPARATUS FOR AN EUV ILLUMINATION BEAM

METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET...

METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET...

METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET...

Method of Manufacturing an Optical Element

Diffractive optical element