Ralf Frese

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Measuring system for measuring an imaging quality of an EUV lens
- Patent number 9,494,483
- Issue date Nov 15, 2016
- Carl Zeiss SMT GmbH
- Ralf Frese
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Measuring System for Measuring an Imaging Quality of an EUV Lens
- Publication number 20150009492
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Ralf Frese
- G01 - MEASURING TESTING