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Ralf Kuschnereit
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Oberkochen, DE
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Patents Grants
last 30 patents
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Patent Grant
Holding device for an optical element made of a crystalline material
Patent number
6,667,839
Issue date
Dec 23, 2003
Carl Zeiss SMT AG
Jürgen Hartmaier
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Holding device for an optical element made of a crystalline material
Publication number
20020108928
Publication date
Aug 15, 2002
Carl Zeiss Semiconductor Manufacturing Technologies, AG
Jurgen Hartmaier
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...