Ralf Lindner

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Devices for determining layer thickness and/or contamination level...
- Patent number 9,250,062
- Issue date Feb 2, 2016
- Carl Zeiss SMT GmbH
- Bernd Doerband
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEVICES FOR DETERMINING LAYER THICKNESS AND/OR CONTAMINATION LEVEL...
- Publication number 20140185060
- Publication date Jul 3, 2014
- Bernd Doerband
- G01 - MEASURING TESTING
Information Patent Application
Illumination system for a microlithographic projection exposure app...
- Publication number 20060055909
- Publication date Mar 16, 2006
- Carl Zeiss SMT AG
- Damian Fiolka
- G02 - OPTICS