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Ralf Moser
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Oberkochen, DE
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last 30 patents
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Patent Grant
Support of an optical element
Patent number
11,366,393
Issue date
Jun 21, 2022
Carl Zeiss SMT GmbH
Eugen Anselm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element, in particular for a microlithographic projection e...
Patent number
10,578,974
Issue date
Mar 3, 2020
Carl Zeiss SMT GmbH
Ralf Moser
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
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Patent Application
SUPPORT OF AN OPTICAL ELEMENT
Publication number
20200249577
Publication date
Aug 6, 2020
Carl Zeiss SMT GMBH
Eugen Anselm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION E...
Publication number
20190302624
Publication date
Oct 3, 2019
Carl Zeiss SMT GMBH
Ralf Moser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY