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Ralf Otto
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Kesselsdorf, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for determining the end point for a cleaning etching process
Patent number
7,354,778
Issue date
Apr 8, 2008
Infineon Technologies AG
Percy Heger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for exposing at least one or at least two semiconductor wafers
Patent number
6,979,522
Issue date
Dec 27, 2005
Infineon Technologies AG
Heiko Hommen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for controlling a processing device for a sequential process...
Patent number
6,684,124
Issue date
Jan 27, 2004
Infineon Technologies AG
Thorsten Schedel
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Configuration and method for detecting defects on a substrate in a...
Publication number
20040117055
Publication date
Jun 17, 2004
Torsten Seidel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for determining the end point for a cleaning etching process
Publication number
20040087170
Publication date
May 6, 2004
Percy Heger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for exposing at least one or at least two semiconductor wafers
Publication number
20040029025
Publication date
Feb 12, 2004
Heiko Hommen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for controlling a process appliance for the sequential proce...
Publication number
20020183879
Publication date
Dec 5, 2002
Thorsten Schedel
H01 - BASIC ELECTRIC ELEMENTS