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Ralf Peter Brinkmann
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Erkrath, DE
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last 30 patents
Information
Patent Grant
Device and use of the device for measuring the density and/or the e...
Patent number
9,113,543
Issue date
Aug 18, 2015
Ruhr-Universität Bochum
Ralf Peter Brinkmann
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for controlling ion energy in radio frequency plasmas
Patent number
8,933,629
Issue date
Jan 13, 2015
Ruhr-Universität Bochum
Brian George Heil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for controlling ion energy in radio frequency plasmas
Patent number
8,643,280
Issue date
Feb 4, 2014
Ruhr-Universität Bochum
Brian George Heil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and use of the apparatus for the determination of the den...
Patent number
7,878,045
Issue date
Feb 1, 2011
Ralf-Peter Brinkmann
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS
Publication number
20140103808
Publication date
Apr 17, 2014
RUHR-UNIVERSITÄT BOCHUM
Brian George Heil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND USE OF THE DEVICE FOR MEASURING THE DENSITY AND/OR THE E...
Publication number
20130160523
Publication date
Jun 27, 2013
RUHR-UNIVERSITÄT BOCHUM
Ralf Peter Brinkmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR PLASMA TREATMENT OF A FLAT SUBSTRATE
Publication number
20120097641
Publication date
Apr 26, 2012
FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGWANDTEN FORSCHUNG E.V.
Rudolf Beckmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS
Publication number
20110248634
Publication date
Oct 13, 2011
RUHR-UNIVERSITAT
Brian George Heil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Use of the Apparatus for the Determination of the Den...
Publication number
20090133471
Publication date
May 28, 2009
Ralf-Peter Brinkmann
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR