Ralf Scharnweber

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical system for a microlithographic projection exposure apparatu...
- Patent number 9,946,161
- Issue date Apr 17, 2018
- Carl Zeiss SMT GmbH
- Ingo Saenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 9,575,414
- Issue date Feb 21, 2017
- Carl Zeiss SMT GmbH
- Johannes Wangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 9,217,930
- Issue date Dec 22, 2015
- Carl Zeiss SMT GmbH
- Johannes Wangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for a multiple exposure, microlithography projection exposur...
- Patent number 8,634,060
- Issue date Jan 21, 2014
- Carl Zeiss SMT GmbH
- Ralf Scharnweber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optics for EUV microlithography and related system and...
- Patent number 8,587,767
- Issue date Nov 19, 2013
- Carl Zeiss SMT GmbH
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical integrator for an illumination system of a microlithographi...
- Patent number 8,520,307
- Issue date Aug 27, 2013
- Carl Zeiss SMT GmbH
- Oliver Wolf
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 8,395,756
- Issue date Mar 12, 2013
- Carl Zeiss SMT GmbH
- Johannes Wangler
- G02 - OPTICS
Information Patent Grant
Optical integrator for an illumination system of a microlithographi...
- Patent number 7,880,969
- Issue date Feb 1, 2011
- Carl Zeiss SMT AG
- Oliver Wolf
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for a multiple exposure, microlithography projection exposur...
- Patent number 7,875,418
- Issue date Jan 25, 2011
- Carl Zeiss SMT AG
- Ralf Scharnweber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for a multiple exposure, microlithography projection exposur...
- Patent number 7,561,253
- Issue date Jul 14, 2009
- Carl Zeiss SMT AG
- Ralf Scharnweber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20160077446
- Publication date Mar 17, 2016
- Carl Zeiss SMT GMBH
- Johannes Wangler
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20130148092
- Publication date Jun 13, 2013
- Carl Zeiss SMT GMBH
- Johannes Wangler
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATU...
- Publication number 20130077077
- Publication date Mar 28, 2013
- Carl Zeiss SMT GMBH
- Ingo Saenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL INTEGRATOR FOR AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHI...
- Publication number 20110083542
- Publication date Apr 14, 2011
- Carl Zeiss SMT GMBH
- Oliver Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY AND RELATED SYSTEM AND...
- Publication number 20110063598
- Publication date Mar 17, 2011
- Carl Zeiss SMT GMBH
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR A MULTIPLE EXPOSURE, MICROLITHOGRAPHY PROJECTION EXPOSUR...
- Publication number 20100173250
- Publication date Jul 8, 2010
- Carl Zeiss SMT AG
- Ralf Scharnweber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL INTEGRATOR FOR AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHI...
- Publication number 20090021839
- Publication date Jan 22, 2009
- Carl Zeiss SMT AG
- Oliver Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20090021716
- Publication date Jan 22, 2009
- Carl Zeiss SMT AG
- Johannes Wangler
- G02 - OPTICS
Information Patent Application
METHOD FOR A MULTIPLE EXPOSURE, MICROLITHOGRAPHY PROJECTION EXPOSUR...
- Publication number 20080311526
- Publication date Dec 18, 2008
- Carl Zeiss SMT AG
- Ralf Scharnweber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination system for a microlithographic projection exposure app...
- Publication number 20060055909
- Publication date Mar 16, 2006
- Carl Zeiss SMT AG
- Damian Fiolka
- G02 - OPTICS
Information Patent Application
Method for a multiple exposure, microlithography projection exposur...
- Publication number 20050213070
- Publication date Sep 29, 2005
- Carl Zeiss SMT AG
- Ralf Scharnweber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Ralf Scharnweber

Person

Patents Grantslast 30 patents

Optical system for a microlithographic projection exposure apparatu...

Illumination system for a microlithographic projection exposure app...

Illumination system for a microlithographic projection exposure app...

Method for a multiple exposure, microlithography projection exposur...

Illumination optics for EUV microlithography and related system and...

Optical integrator for an illumination system of a microlithographi...

Illumination system for a microlithographic projection exposure app...

Optical integrator for an illumination system of a microlithographi...

Method for a multiple exposure, microlithography projection exposur...

Method for a multiple exposure, microlithography projection exposur...

Patents Applicationslast 30 patents

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATU...

OPTICAL INTEGRATOR FOR AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHI...

ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY AND RELATED SYSTEM AND...

METHOD FOR A MULTIPLE EXPOSURE, MICROLITHOGRAPHY PROJECTION EXPOSUR...

OPTICAL INTEGRATOR FOR AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHI...

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

METHOD FOR A MULTIPLE EXPOSURE, MICROLITHOGRAPHY PROJECTION EXPOSUR...

Illumination system for a microlithographic projection exposure app...

Method for a multiple exposure, microlithography projection exposur...