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Ralf WINTER
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Schwaebisch Gmuend, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for treating a reflective optical element for the EUV wavele...
Patent number
11,328,831
Issue date
May 10, 2022
Carl Zeiss SMT GmbH
Christian Grasse
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Optical assembly having a thermally conductive component
Patent number
11,194,119
Issue date
Dec 7, 2021
Carl Zeiss SMT GmbH
Julian Kaller
G02 - OPTICS
Information
Patent Grant
Method for repairing reflective optical elements for EUV lithography
Patent number
11,099,484
Issue date
Aug 24, 2021
Carl Zeiss SMT GmbH
Robert Meier
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Reflective optical element for EUV lithography
Patent number
10,649,340
Issue date
May 12, 2020
Carl Zeiss SMT GmbH
Dirk Heinrich Ehm
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Optical assembly having a thermally conductive component
Patent number
10,509,336
Issue date
Dec 17, 2019
Carl Zeiss SMT GmbH
Julian Kaller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV mirror and optical system comprising EUV mirror
Patent number
10,203,435
Issue date
Feb 12, 2019
Carl Zeiss SMT GmbH
Thomas Schicketanz
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Reflective optical element, and optical system of a microlithograph...
Patent number
9,915,873
Issue date
Mar 13, 2018
Carl Zeiss SMT GmbH
Hartmut Enkisch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT
Publication number
20230075759
Publication date
Mar 9, 2023
Carl Zeiss SMT GMBH
Ralf WINTER
G02 - OPTICS
Information
Patent Application
OPTICAL ASSEMBLY HAVING A THERMALLY CONDUCTIVE COMPONENT
Publication number
20200103771
Publication date
Apr 2, 2020
Carl Zeiss SMT GMBH
Julian Kaller
G02 - OPTICS
Information
Patent Application
METHOD FOR REPAIRING REFLECTIVE OTPICAL ELEMENTS FOR EUV LITHOGRAPHY
Publication number
20190302628
Publication date
Oct 3, 2019
Carl Zeiss SMT GMBH
Robert MEIER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY
Publication number
20190171108
Publication date
Jun 6, 2019
Carl Zeiss SMT GMBH
Dirk Heinrich EHM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT AND OPTICAL ASSEMBLY COMPRISING SAME
Publication number
20190064405
Publication date
Feb 28, 2019
Carl Zeiss SMT GMBH
Christian GRASSE
G02 - OPTICS
Information
Patent Application
METHOD FOR TREATING A REFLECTIVE OPTICAL ELEMENT FOR THE EUV WAVELE...
Publication number
20190035512
Publication date
Jan 31, 2019
Carl Zeiss SMT GMBH
Christian Grasse
G02 - OPTICS
Information
Patent Application
OPTICAL ASSEMBLY HAVING A THERMALLY CONDUCTIVE COMPONENT
Publication number
20170261867
Publication date
Sep 14, 2017
Carl Zeiss SMT GMBH
Julian Kaller
G02 - OPTICS
Information
Patent Application
EUV MIRROR AND OPTICAL SYSTEM COMPRISING EUV MIRROR
Publication number
20160327702
Publication date
Nov 10, 2016
Carl Zeiss SMT GMBH
Thomas SCHICKETANZ
G02 - OPTICS
Information
Patent Application
REFLECTIVE OPTICAL ELEMENT, AND OPTICAL SYSTEM OF A MICROLITHOGRAPH...
Publication number
20160266499
Publication date
Sep 15, 2016
Carl Zeiss SMT GMBH
Hartmut ENKISCH
G02 - OPTICS