Ralph Brinkhof

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Metrology method and associated metrology and lithographic apparatuses
- Patent number 12,032,299
- Issue date Jul 9, 2024
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of measuring an alignment mark or an alignment mark assembly...
- Patent number 11,442,372
- Issue date Sep 13, 2022
- ASML Netherlands B.V.
- Franciscus Godefridus Casper Bijnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method
- Patent number 11,029,610
- Issue date Jun 8, 2021
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method
- Patent number 10,962,887
- Issue date Mar 30, 2021
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of controlling a lithographic apparatus and device manufactu...
- Patent number 10,901,326
- Issue date Jan 26, 2021
- ASML Netherlands B.V.
- Edo Maria Hulsebos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of controlling a lithographic apparatus and device manufactu...
- Patent number 10,620,549
- Issue date Apr 14, 2020
- ASML Netherlands B.V.
- Edo Maria Hulsebos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method
- Patent number 10,527,958
- Issue date Jan 7, 2020
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measuring method of an alignment target
- Patent number 10,416,577
- Issue date Sep 17, 2019
- ASML Holding N.V.
- Ralph Brinkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of controlling a lithographic apparatus and device manufactu...
- Patent number 10,331,040
- Issue date Jun 25, 2019
- ASML Netherlands B.V.
- Edo Maria Hulsebos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Level sensor arrangement for lithographic apparatus and device manu...
- Patent number 8,842,293
- Issue date Sep 23, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Level sensor, lithographic apparatus, and substrate surface positio...
- Patent number 8,675,210
- Issue date Mar 18, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining exposure settings, lithographic exposure app...
- Patent number 8,208,118
- Issue date Jun 26, 2012
- ASML Netherlands B.V.
- David Warren Burry
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for positioning a target portion of a substrate with respect...
- Patent number 7,889,357
- Issue date Feb 15, 2011
- ASML Netherlands B.V.
- Cornelis Henricus Van De Vin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for positioning a target portion of a substrate with respect...
- Patent number 7,746,484
- Issue date Jun 29, 2010
- ASML Netherlands B.V.
- Cornelis Henricus Van De Vin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining a map, device manufacturing method, and lith...
- Patent number 7,649,635
- Issue date Jan 19, 2010
- ASML Netherlands B.V.
- Hielke Schoonewelle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining a map, device manufacturing method, and lith...
- Patent number 7,292,351
- Issue date Nov 6, 2007
- ASML Netherlands B.V.
- Hielke Schoonewelle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Using unflatness information of the substrate table or mask table f...
- Patent number 7,239,368
- Issue date Jul 3, 2007
- ASML Netherlands B.V.
- Rene Oesterholt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly comprising a sensor for determining at least one of tilt a...
- Patent number 7,113,257
- Issue date Sep 26, 2006
- ASML Netherlands B.V.
- Ralph Brinkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MODELING MEASUREMENT DATA OVER A SUBSTRATE AREA AND ASSO...
- Publication number 20240192610
- Publication date Jun 13, 2024
- ASML NETHERLANDS B.V.
- Gijs TEN HAAF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES
- Publication number 20240012342
- Publication date Jan 11, 2024
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus GOORDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES
- Publication number 20230017491
- Publication date Jan 19, 2023
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CONTROLLING A SEMICONDUCTOR MANUFACTURING PROCESS
- Publication number 20220236647
- Publication date Jul 28, 2022
- ASML NETHERLANDS B.V.
- Marc HAUPTMANN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MEASURING AN ALIGNMENT MARK OR AN ALIGNMENT MARK ASSEMBLY...
- Publication number 20220187722
- Publication date Jun 16, 2022
- ASML NETHERLANDS B.V.
- Franciscus Godefridus Casper BIJNEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC METHOD
- Publication number 20200272061
- Publication date Aug 27, 2020
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CONTROLLING A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTU...
- Publication number 20200201194
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Edo Maria Hulsebos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC METHOD
- Publication number 20200081356
- Publication date Mar 12, 2020
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC METHOD
- Publication number 20190094721
- Publication date Mar 28, 2019
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION MEASURING METHOD OF AN ALIGNMENT TARGET
- Publication number 20180329307
- Publication date Nov 15, 2018
- ASML NETHERLANDS B.V.
- Ralph BRINKHOF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CONTROLLING A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTU...
- Publication number 20180284621
- Publication date Oct 4, 2018
- ASML NETHERLANDS B.V.
- Edo Maria HULSEBOS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LEVEL SENSOR, LITHOGRAPHIC APPARATUS, AND SUBSTRATE SURFACE POSITIO...
- Publication number 20130077079
- Publication date Mar 28, 2013
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR POSITIONING A TARGET PORTION OF A SUBSTRATE WITH RESPECT...
- Publication number 20110109889
- Publication date May 12, 2011
- ASML NETHERLANDS B.V.
- Cornelis Henricus VAN DE VIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR POSITIONING A TARGET PORTION OF A SUBSTRATE WITH RESPECT...
- Publication number 20100245798
- Publication date Sep 30, 2010
- ASML NETHERLANDS B.V.
- Cornelis Henricus VAN DE VIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LEVEL SENSOR ARRANGEMENT FOR LITHOGRAPHIC APPARATUS AND DEVICE MANU...
- Publication number 20100233600
- Publication date Sep 16, 2010
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Determining Exposure Settings, Lithographic Exposure App...
- Publication number 20090201473
- Publication date Aug 13, 2009
- ASML NETHERLANDS B.V.
- David Warren BURRY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for positioning a target portion of a substrate with respect...
- Publication number 20080151265
- Publication date Jun 26, 2008
- ASML NETHERLANDS B.V.
- Cornelis Henricus Van De Vin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for positioning a target portion of a substrate with respect...
- Publication number 20080151204
- Publication date Jun 26, 2008
- ASML NETHERLANDS B.V.
- Cornelis Henricus Van De Vin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for determining a map, device manufacturing method, and lith...
- Publication number 20080046183
- Publication date Feb 21, 2008
- ASML NETHERLANDS B.V.
- Hielke Schoonewelle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for imaging a pattern onto a target portion of a substrate
- Publication number 20070262268
- Publication date Nov 15, 2007
- ASML NETHERLANDS B.V.
- Martin Jules Marie-Emile De Nivelle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Using unflatness information of the substrate table or mask table f...
- Publication number 20060114436
- Publication date Jun 1, 2006
- ASML NETHERLANDS B.V.
- Rene Oesterholt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for determining a map, device manufacturing method, and lith...
- Publication number 20050186483
- Publication date Aug 25, 2005
- ASML NETHERLANDS B.V.
- Hielke Schoonewelle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for determining a map, device manufacturing method, and lith...
- Publication number 20050134865
- Publication date Jun 23, 2005
- ASML NETHERLANDS B.V.
- Hielke Schoonewelle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Assembly comprising a sensor for determining at least one of tilt a...
- Publication number 20040257545
- Publication date Dec 23, 2004
- ASML NETHERLANDS B.V.
- Ralph Brinkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Ralph Brinkhof

Person

Patents Grantslast 30 patents

Metrology method and associated metrology and lithographic apparatuses

Method of measuring an alignment mark or an alignment mark assembly...

Lithographic method

Lithographic method

Method of controlling a lithographic apparatus and device manufactu...

Method of controlling a lithographic apparatus and device manufactu...

Lithographic method

Position measuring method of an alignment target

Method of controlling a lithographic apparatus and device manufactu...

Level sensor arrangement for lithographic apparatus and device manu...

Level sensor, lithographic apparatus, and substrate surface positio...

Method for determining exposure settings, lithographic exposure app...

Method for positioning a target portion of a substrate with respect...

Method for positioning a target portion of a substrate with respect...

Method for determining a map, device manufacturing method, and lith...

Method for determining a map, device manufacturing method, and lith...

Using unflatness information of the substrate table or mask table f...

Assembly comprising a sensor for determining at least one of tilt a...

Patents Applicationslast 30 patents

METHOD FOR MODELING MEASUREMENT DATA OVER A SUBSTRATE AREA AND ASSO...

METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES

METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES

METHOD FOR CONTROLLING A SEMICONDUCTOR MANUFACTURING PROCESS

METHOD OF MEASURING AN ALIGNMENT MARK OR AN ALIGNMENT MARK ASSEMBLY...

LITHOGRAPHIC METHOD

METHOD OF CONTROLLING A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTU...

LITHOGRAPHIC METHOD

LITHOGRAPHIC METHOD

POSITION MEASURING METHOD OF AN ALIGNMENT TARGET

METHOD OF CONTROLLING A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTU...

LEVEL SENSOR, LITHOGRAPHIC APPARATUS, AND SUBSTRATE SURFACE POSITIO...

METHOD FOR POSITIONING A TARGET PORTION OF A SUBSTRATE WITH RESPECT...

METHOD FOR POSITIONING A TARGET PORTION OF A SUBSTRATE WITH RESPECT...

LEVEL SENSOR ARRANGEMENT FOR LITHOGRAPHIC APPARATUS AND DEVICE MANU...

Method for Determining Exposure Settings, Lithographic Exposure App...

Method for positioning a target portion of a substrate with respect...

Method for positioning a target portion of a substrate with respect...

Method for determining a map, device manufacturing method, and lith...

Method for imaging a pattern onto a target portion of a substrate

Using unflatness information of the substrate table or mask table f...

Method for determining a map, device manufacturing method, and lith...

Method for determining a map, device manufacturing method, and lith...

Assembly comprising a sensor for determining at least one of tilt a...