Ram Charan

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Bangalore, IN

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for rapid pump-down of a high-vacuum loadlock
- Patent number 10,115,608
- Issue date Oct 30, 2018
- Novellus Systems, Inc.
- Edmund B. Minshall
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR RAPID PUMP-DOWN OF A HIGH-VACUUM LOADLOCK
- Publication number 20130312835
- Publication date Nov 28, 2013
- Edmund B. Minshall
- H01 - BASIC ELECTRIC ELEMENTS