Ramachandran Balasubramanian

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Thermal processing susceptor
- Patent number 11,848,226
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Thermal processing susceptor
- Patent number 10,930,543
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Absorbing reflector for semiconductor processing chamber
- Patent number 10,306,708
- Issue date May 28, 2019
- Applied Materials, Inc.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical endpoint detection system
- Patent number 10,179,354
- Issue date Jan 15, 2019
- Applied Materials, Inc.
- Balasubramanian Ramachandran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multizone control of lamps in a conical lamphead using pyrometers
- Patent number 10,077,508
- Issue date Sep 18, 2018
- Applied Materials, Inc.
- Joseph M. Ranish
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing susceptor
- Patent number 10,062,598
- Issue date Aug 28, 2018
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Oxidized showerhead and process kit parts and methods of using same
- Patent number 9,914,999
- Issue date Mar 13, 2018
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber having separate process gas and purge gas regions
- Patent number 9,870,919
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Joseph M. Ranish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Absorbing lamphead face
- Patent number 9,842,753
- Issue date Dec 12, 2017
- Applied Materials, Inc.
- Paul Brillhart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Absorbing reflector for semiconductor processing chamber
- Patent number 9,832,816
- Issue date Nov 28, 2017
- Applied Materials, Inc.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multizone control of lamps in a conical lamphead using pyrometers
- Patent number 9,580,835
- Issue date Feb 28, 2017
- Applied Materials, Inc.
- Joseph M. Ranish
- C30 - CRYSTAL GROWTH
Information Patent Grant
Susceptor support shaft with uniformity tuning lenses for EPI process
- Patent number 9,532,401
- Issue date Dec 27, 2016
- Applied Materials, Inc.
- Zhepeng Cong
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical endpoint detection system
- Patent number 9,347,132
- Issue date May 24, 2016
- Applied Materials, Inc.
- Balasubramanian Ramachandran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multizone control of lamps in a conical lamphead using pyrometers
- Patent number 9,230,837
- Issue date Jan 5, 2016
- Applied Materials, Inc.
- Joseph M. Ranish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Epitaxial chamber with cross flow
- Patent number 9,127,360
- Issue date Sep 8, 2015
- Applied Materials, Inc.
- Balasubramanian Ramachandran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of improving oxide growth rate of selective oxidation processes
- Patent number 9,117,661
- Issue date Aug 25, 2015
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ chamber cleaning for an RTP chamber
- Patent number 8,821,643
- Issue date Sep 2, 2014
- Applied Materials, Inc.
- Balasubramanian Ramachandran
- B08 - CLEANING
Information Patent Grant
Multizone control of lamps in a conical lamphead using pyrometers
- Patent number 8,772,055
- Issue date Jul 8, 2014
- Applied Materials, Inc.
- Joseph M. Ranish
- G01 - MEASURING TESTING
Information Patent Grant
Method of improving oxide growth rate of selective oxidation processes
- Patent number 8,546,271
- Issue date Oct 1, 2013
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for reducing patterning effects on a substrate...
- Patent number 8,513,626
- Issue date Aug 20, 2013
- Applied Materials, Inc.
- Balasubramanian Ramachandran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lamp with internal fuse system
- Patent number 8,217,574
- Issue date Jul 10, 2012
- Applied Materials, Inc.
- Balasubramanian Ramachandran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature uniformity measurement during thermal processing
- Patent number 8,109,669
- Issue date Feb 7, 2012
- Applied Materials, Inc.
- Wolfgang Aderhold
- G01 - MEASURING TESTING
Information Patent Grant
Method of improving oxide growth rate of selective oxidation processes
- Patent number 7,951,728
- Issue date May 31, 2011
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor thermal process control
- Patent number 7,778,533
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor thermal process control utilizing position oriented t...
- Patent number 7,667,162
- Issue date Feb 23, 2010
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lamp array for thermal processing exhibiting improved radial unifor...
- Patent number 7,509,035
- Issue date Mar 24, 2009
- Applied Materials, Inc.
- Joseph M. Ranish
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Adaptive control method for rapid thermal processing of a substrate
- Patent number 7,398,693
- Issue date Jul 15, 2008
- Applied Materials, Inc.
- Joseph Michael Ranish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tailored temperature uniformity
- Patent number 7,127,367
- Issue date Oct 24, 2006
- Applied Materials, Inc.
- Balasubramanian Ramachandran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for low temperature pyrometry useful for therm...
- Patent number 7,112,763
- Issue date Sep 26, 2006
- Applied Materials, Inc.
- Aaron Hunter
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Advances in spike anneal processes for ultra shallow junctions
- Patent number 6,897,131
- Issue date May 24, 2005
- Applied Materials, Inc.
- Balasubramanian Ramachandran
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20240112945
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Anhthu NGO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20210175115
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- Anhthu NGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20180366363
- Publication date Dec 20, 2018
- Applied Materials, Inc.
- Anhthu NGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER HAVING SEPARATE PROCESS GAS AND PURGE GAS REGIONS
- Publication number 20180138031
- Publication date May 17, 2018
- Applied Materials, Inc.
- Joseph M. RANISH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20180084610
- Publication date Mar 22, 2018
- Applied Materials, Inc.
- Kin Pong LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS
- Publication number 20170130359
- Publication date May 11, 2017
- Applied Materials, Inc.
- Joseph M. RANISH
- C30 - CRYSTAL GROWTH
Information Patent Application
ABSORBING LAMPHEAD FACE
- Publication number 20160336205
- Publication date Nov 17, 2016
- Applied Materials, Inc.
- Paul BRILLHART
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDIZED SHOWERHEAD AND PROCESS KIT PARTS AND METHODS OF USING SAME
- Publication number 20160319428
- Publication date Nov 3, 2016
- Applied Materials, Inc.
- Muhammad M. RASHEED
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL ENDPOINT DETECTION SYSTEM
- Publication number 20160263634
- Publication date Sep 15, 2016
- BALASUBRAMANIAN RAMACHANDRAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS
- Publication number 20160138188
- Publication date May 19, 2016
- Applied Materials, Inc.
- Joseph M. RANISH
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE THERMAL CONTROL IN AN EPI CHAMBER
- Publication number 20150368829
- Publication date Dec 24, 2015
- Applied Materials, Inc.
- Anhthu NGO
- C30 - CRYSTAL GROWTH
Information Patent Application
ONE-PIECE INJECTOR ASSEMBLY AND ONE-PIECE EXHAUST LINER
- Publication number 20150368830
- Publication date Dec 24, 2015
- Applied Materials, Inc.
- Paul BRILLHART
- C30 - CRYSTAL GROWTH
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20150340266
- Publication date Nov 26, 2015
- Applied Materials, Inc.
- Anhthu NGO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIFORMITY AND SELECTIVITY OF LOW GAS FLOW VELOCITY PROCESSES IN A...
- Publication number 20150329969
- Publication date Nov 19, 2015
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20140376898
- Publication date Dec 25, 2014
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABSORBING LAMPHEAD FACE
- Publication number 20140319120
- Publication date Oct 30, 2014
- Paul BRILLHART
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR SUPPORT SHAFT WITH UNIFORMITY TUNING LENSES FOR EPI PROCESS
- Publication number 20140263268
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Zhepeng Cong
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS
- Publication number 20140273419
- Publication date Sep 18, 2014
- Joseph M. RANISH
- C30 - CRYSTAL GROWTH
Information Patent Application
MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS
- Publication number 20140199785
- Publication date Jul 17, 2014
- Joseph M. RANISH
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF IMPROVING OXIDE GROWTH RATE OF SELECTIVE OXIDATION PROCESSES
- Publication number 20140057455
- Publication date Feb 27, 2014
- Applied Materials, Inc.
- Yoshitaka YOKOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER HAVING SEPARATE PROCESS GAS AND PURGE GAS REGIONS
- Publication number 20130288460
- Publication date Oct 31, 2013
- Joseph M. RANISH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DELIVERY SYSTEMS AND METHODS OF USE THEREOF
- Publication number 20130255784
- Publication date Oct 3, 2013
- Applied Materials, Inc.
- ZHIYUAN YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU CHAMBER CLEANING FOR AN RTP CHAMBER
- Publication number 20130178072
- Publication date Jul 11, 2013
- BALASUBRAMANIAN RAMACHANDRAN
- B08 - CLEANING
Information Patent Application
METHODS AND APPARATUS FOR DEPOSITION PROCESSES
- Publication number 20130025538
- Publication date Jan 31, 2013
- Applied Materials, Inc.
- RICHARD O. COLLINS
- C30 - CRYSTAL GROWTH
Information Patent Application
OPTICAL ENDPOINT DETECTION SYSTEM
- Publication number 20120273005
- Publication date Nov 1, 2012
- Applied Materials, Inc.
- BALASUBRAMANIAN RAMACHANDRAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF IMPROVING OXIDE GROWTH RATE OF SELECTIVE OXIDATION PROCESSES
- Publication number 20110230060
- Publication date Sep 22, 2011
- YOSHITAKA YOKOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPITAXIAL CHAMBER WITH CROSS FLOW
- Publication number 20110174212
- Publication date Jul 21, 2011
- Applied Materials, Inc.
- BALASUBRAMANIAN RAMACHANDRAN
- C30 - CRYSTAL GROWTH
Information Patent Application
LAMP WITH INTERNAL FUSE SYSTEM
- Publication number 20100308729
- Publication date Dec 9, 2010
- Applied Materials, Inc.
- BALASUBRAMANIAN RAMACHANDRAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE UNIFORMITY MEASUREMENT DURING THERMAL PROCESSING
- Publication number 20100124249
- Publication date May 20, 2010
- Applied Materials, Inc.
- WOLFGANG ADERHOLD
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF IMPROVING OXIDE GROWTH RATE OF SELECTIVE OXIDATION PROCESSES
- Publication number 20090081884
- Publication date Mar 26, 2009
- YOSHITAKA YOKOTA
- H01 - BASIC ELECTRIC ELEMENTS

Ramachandran Balasubramanian

Person

Patents Grantslast 30 patents

Thermal processing susceptor

Thermal processing susceptor

Absorbing reflector for semiconductor processing chamber

Optical endpoint detection system

Multizone control of lamps in a conical lamphead using pyrometers

Thermal processing susceptor

Oxidized showerhead and process kit parts and methods of using same

Process chamber having separate process gas and purge gas regions

Absorbing lamphead face

Absorbing reflector for semiconductor processing chamber

Multizone control of lamps in a conical lamphead using pyrometers

Susceptor support shaft with uniformity tuning lenses for EPI process

Optical endpoint detection system

Multizone control of lamps in a conical lamphead using pyrometers

Epitaxial chamber with cross flow

Method of improving oxide growth rate of selective oxidation processes

In-situ chamber cleaning for an RTP chamber

Multizone control of lamps in a conical lamphead using pyrometers

Method of improving oxide growth rate of selective oxidation processes

Method and apparatus for reducing patterning effects on a substrate...

Lamp with internal fuse system

Temperature uniformity measurement during thermal processing

Method of improving oxide growth rate of selective oxidation processes

Semiconductor thermal process control

Semiconductor thermal process control utilizing position oriented t...

Lamp array for thermal processing exhibiting improved radial unifor...

Adaptive control method for rapid thermal processing of a substrate

Tailored temperature uniformity

Method and apparatus for low temperature pyrometry useful for therm...

Advances in spike anneal processes for ultra shallow junctions

Patents Applicationslast 30 patents

THERMAL PROCESSING SUSCEPTOR

THERMAL PROCESSING SUSCEPTOR

THERMAL PROCESSING SUSCEPTOR

PROCESS CHAMBER HAVING SEPARATE PROCESS GAS AND PURGE GAS REGIONS

ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS

ABSORBING LAMPHEAD FACE

OXIDIZED SHOWERHEAD AND PROCESS KIT PARTS AND METHODS OF USING SAME

OPTICAL ENDPOINT DETECTION SYSTEM

MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS

SUBSTRATE THERMAL CONTROL IN AN EPI CHAMBER

ONE-PIECE INJECTOR ASSEMBLY AND ONE-PIECE EXHAUST LINER

THERMAL PROCESSING SUSCEPTOR

UNIFORMITY AND SELECTIVITY OF LOW GAS FLOW VELOCITY PROCESSES IN A...

ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

ABSORBING LAMPHEAD FACE

SUSCEPTOR SUPPORT SHAFT WITH UNIFORMITY TUNING LENSES FOR EPI PROCESS

MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS

MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS

METHOD OF IMPROVING OXIDE GROWTH RATE OF SELECTIVE OXIDATION PROCESSES

PROCESS CHAMBER HAVING SEPARATE PROCESS GAS AND PURGE GAS REGIONS

GAS DELIVERY SYSTEMS AND METHODS OF USE THEREOF

IN-SITU CHAMBER CLEANING FOR AN RTP CHAMBER

METHODS AND APPARATUS FOR DEPOSITION PROCESSES

OPTICAL ENDPOINT DETECTION SYSTEM

METHOD OF IMPROVING OXIDE GROWTH RATE OF SELECTIVE OXIDATION PROCESSES

EPITAXIAL CHAMBER WITH CROSS FLOW

LAMP WITH INTERNAL FUSE SYSTEM

TEMPERATURE UNIFORMITY MEASUREMENT DURING THERMAL PROCESSING

METHOD OF IMPROVING OXIDE GROWTH RATE OF SELECTIVE OXIDATION PROCESSES