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Ramana Veerasingam
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Scott Valley, CA, US
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last 30 patents
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Patent Grant
Reduction of plasma edge effect on plasma enhanced CVD processes
Patent number
6,553,932
Issue date
Apr 29, 2003
Applied Materials, Inc.
Kuo-Shih Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Reduction of plasma edge effect on plasma enhanced CVD processes
Publication number
20010042511
Publication date
Nov 22, 2001
APPLIED MATERIALS, INC.
Kuo-Shih Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...