Ramanath Ganapathiraman

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Urbana, IL, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for tungsten nucleation from WF.sub.6 using titanium as a re...
- Patent number 5,963,828
- Issue date Oct 5, 1999
- LSI Logic Corporation
- Derryl D.J. Allman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...