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Chennai, IN
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last 30 patents
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Patent Grant
Hot showerhead
Patent number
11,946,140
Issue date
Apr 2, 2024
Applied Materials, Inc.
Anantha K. Subramani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
RF return path for reduction of parasitic plasma
Patent number
11,335,543
Issue date
May 17, 2022
Applied Materials, Inc.
Anantha K. Subramani
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT
Publication number
20240096605
Publication date
Mar 21, 2024
Applied Materials, Inc.
Arun Kumar Kotrappa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Showerhead Assembly with Heated Showerhead
Publication number
20240068096
Publication date
Feb 29, 2024
Anantha K. SUBRAMANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD ASSEMBLY WITH HEATED SHOWERHEAD
Publication number
20230335377
Publication date
Oct 19, 2023
Anantha K. SUBRAMANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BIASABLE ROTATING PEDESTAL
Publication number
20230282506
Publication date
Sep 7, 2023
Applied Materials, Inc.
Anantha Subramani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HOT SHOWERHEAD
Publication number
20220307131
Publication date
Sep 29, 2022
Applied Materials, Inc.
Anantha K. Subramani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RF RETURN PATH FOR REDUCTION OF PARASITIC PLASMA
Publication number
20210305020
Publication date
Sep 30, 2021
Applied Materials, Inc.
Anantha K. Subramani
H01 - BASIC ELECTRIC ELEMENTS