Ramcharan Sundar

Person

  • Chennai, IN

Patents Grantslast 30 patents

  • Information Patent Grant

    Hot showerhead

    • Patent number 11,946,140
    • Issue date Apr 2, 2024
    • Applied Materials, Inc.
    • Anantha K. Subramani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    RF return path for reduction of parasitic plasma

    • Patent number 11,335,543
    • Issue date May 17, 2022
    • Applied Materials, Inc.
    • Anantha K. Subramani
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT

    • Publication number 20240096605
    • Publication date Mar 21, 2024
    • Applied Materials, Inc.
    • Arun Kumar Kotrappa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Showerhead Assembly with Heated Showerhead

    • Publication number 20240068096
    • Publication date Feb 29, 2024
    • Anantha K. SUBRAMANI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD ASSEMBLY WITH HEATED SHOWERHEAD

    • Publication number 20230335377
    • Publication date Oct 19, 2023
    • Anantha K. SUBRAMANI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    BIASABLE ROTATING PEDESTAL

    • Publication number 20230282506
    • Publication date Sep 7, 2023
    • Applied Materials, Inc.
    • Anantha Subramani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HOT SHOWERHEAD

    • Publication number 20220307131
    • Publication date Sep 29, 2022
    • Applied Materials, Inc.
    • Anantha K. Subramani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RF RETURN PATH FOR REDUCTION OF PARASITIC PLASMA

    • Publication number 20210305020
    • Publication date Sep 30, 2021
    • Applied Materials, Inc.
    • Anantha K. Subramani
    • H01 - BASIC ELECTRIC ELEMENTS