Ramesh Chandrasekharan

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with seal surface
- Patent number 12,142,509
- Issue date Nov 12, 2024
- Lam Research Corporation
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestals for modulating film properties in atomic layer deposition...
- Patent number 12,110,586
- Issue date Oct 8, 2024
- Lam Research Corporation
- Adrien Lavoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Trim and deposition profile control with multi-zone heated substrat...
- Patent number 12,071,689
- Issue date Aug 27, 2024
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Progressive heating of components of substrate processing systems u...
- Patent number 12,062,554
- Issue date Aug 13, 2024
- Lam Research Corporation
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for reducing effluent build-up in a pumping exh...
- Patent number 12,049,698
- Issue date Jul 30, 2024
- Lam Research Corporation
- Antonio Xavier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fill on demand ampoule refill
- Patent number 11,959,175
- Issue date Apr 16, 2024
- Lam Research Corporation
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing systems including gas delivery system with red...
- Patent number 11,959,172
- Issue date Apr 16, 2024
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic temperature control of substrate support in substrate proce...
- Patent number 11,908,715
- Issue date Feb 20, 2024
- Lam Research Corporation
- Sairam Sundaram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,725,282
- Issue date Aug 15, 2023
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing systems including gas delivery system with red...
- Patent number 11,661,654
- Issue date May 30, 2023
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planar substrate edge contact with open volume equalization pathway...
- Patent number 11,443,975
- Issue date Sep 13, 2022
- Lam Research Corporation
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for reducing effluent build-up in a pumping exh...
- Patent number 11,332,824
- Issue date May 17, 2022
- Lam Research Corporation
- Antonio Xavier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi zone substrate support for ALD film property correction and t...
- Patent number 11,236,422
- Issue date Feb 1, 2022
- Lam Research Corporation
- Michael Philip Roberts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucking pedestal with substrate backside purging and...
- Patent number 11,232,966
- Issue date Jan 25, 2022
- Lam Research Corporation
- Timothy S. Thomas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Progressive heating of components of substrate processing systems u...
- Patent number 11,183,400
- Issue date Nov 23, 2021
- Lam Research Corporation
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,111,581
- Issue date Sep 7, 2021
- Lam Research Corporation
- Chunguang Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fill on demand ampoule refill
- Patent number 11,072,860
- Issue date Jul 27, 2021
- Lam Research Corporation
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppressing interfacial reactions by varying the wafer temperature...
- Patent number 11,075,127
- Issue date Jul 27, 2021
- Lam Research Corporation
- Seshasayee Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Use of voltage and current measurements to control dual zone cerami...
- Patent number 11,028,482
- Issue date Jun 8, 2021
- Lam Research Corporation
- Aaron Durbin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus including an isothermal processing zone
- Patent number 10,808,317
- Issue date Oct 20, 2020
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical deposition chamber having gas seal
- Patent number 10,781,516
- Issue date Sep 22, 2020
- Lam Research Corporation
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low volume showerhead with porous baffle
- Patent number 10,741,365
- Issue date Aug 11, 2020
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of voltage and current measurements to control dual zone cerami...
- Patent number 10,633,742
- Issue date Apr 28, 2020
- LAM RESEARCH FOUNDATION
- Aaron Durbin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planar substrate edge contact with open volume equalization pathway...
- Patent number 10,622,243
- Issue date Apr 14, 2020
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low volume showerhead with faceplate holes for improved flow unifor...
- Patent number 10,378,107
- Issue date Aug 13, 2019
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppressing interfacial reactions by varying the wafer temperature...
- Patent number 10,347,547
- Issue date Jul 9, 2019
- Lam Research Corporation
- Seshasayee Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods enabling low defect processing via controlled s...
- Patent number 10,323,323
- Issue date Jun 18, 2019
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetric pedestal/carrier ring arrangement for edge impedance mod...
- Patent number 10,301,718
- Issue date May 28, 2019
- Lam Research Corporation
- Ryan Blaquiere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 10,287,683
- Issue date May 14, 2019
- Lam Research Corporation
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purge and pumping structures arranged beneath substrate plane to re...
- Patent number 10,157,755
- Issue date Dec 18, 2018
- Lam Research Corporation
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUSES FOR THERMAL MANAGEMENT OF A PEDESTAL AND CHAMBER
- Publication number 20240234200
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Aaron Blake Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILL ON DEMAND AMPOULE REFILL
- Publication number 20240218515
- Publication date Jul 4, 2024
- LAM RESEARCH CORPORATION
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF SIGNAL FILTERING SCHEMES IN HIGH TCR BASED CONTROL
- Publication number 20240203763
- Publication date Jun 20, 2024
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACKSIDE DEPOSITION PREVENTION ON SUBSTRATES
- Publication number 20240200191
- Publication date Jun 20, 2024
- LAM RESEARCH CORPORATION
- Christopher GAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL ZONE HEATERS FOR METALLIC PEDESTALS
- Publication number 20240194506
- Publication date Jun 13, 2024
- LAM RESEARCH CORPORATION
- Sairam SUNDARAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEMS INCLUDING GAS DELIVERY SYSTEM WITH RED...
- Publication number 20230279548
- Publication date Sep 7, 2023
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONCENTRATION CONTROL USING A BUBBLER
- Publication number 20230257878
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATION OF VAPOR DEPOSITION PROCESS INTO PLASMA ETCH REACTOR
- Publication number 20230260759
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Eric A. Hudson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTOELECTRON ASSISTED PLASMA IGNITION
- Publication number 20230207274
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Lee CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED FEEDFORWARD AND FEEDBACK SEQUENCE FOR PATTERNING CD CONTROL
- Publication number 20230170195
- Publication date Jun 1, 2023
- LAM RESEARCH CORPORATION
- Ravi Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER
- Publication number 20230073259
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ASYMMETRIC PURGED BLOCK BENEATH WAFER PLANE TO MANAGE NON-UNIFORMITY
- Publication number 20230009859
- Publication date Jan 12, 2023
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF VACUUM DURING TRANSFER OF SUBSTRATES
- Publication number 20220305601
- Publication date Sep 29, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS AND METHODS FOR REDUCING EFFLUENT BUILD-UP IN A PUMPING EXH...
- Publication number 20220259725
- Publication date Aug 18, 2022
- LAM RESEARCH CORPORATION
- Antonio Xavier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROL OF A MULTI-ZONE PEDESTAL
- Publication number 20220243332
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF ROTATION TO CORRECT FOR AZIMUTHAL NON-UNIFORMITIES IN SEMICO...
- Publication number 20220243323
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INDEPENDENTLY ADJUSTABLE FLOWPATH CONDUCTANCE IN MULTI-STATION SEMI...
- Publication number 20220228263
- Publication date Jul 21, 2022
- LAM RESEARCH CORPORATION
- Michael Philip Roberts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEM...
- Publication number 20220223440
- Publication date Jul 14, 2022
- LAM RESEARCH CORPORATION
- Ravi KUMAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...
- Publication number 20220205105
- Publication date Jun 30, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...
- Publication number 20220162749
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Adrien LAVOIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...
- Publication number 20220037170
- Publication date Feb 3, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTILAYER COATINGS OF COMPONENT PARTS FOR A WORK PIECE PROCESSING...
- Publication number 20220028662
- Publication date Jan 27, 2022
- Paul KONKOLA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20210381106
- Publication date Dec 9, 2021
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILL ON DEMAND AMPOULE REFILL
- Publication number 20210324521
- Publication date Oct 21, 2021
- LAM RESEARCH CORPORATION
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC TEMPERATURE CONTROL OF SUBSTRATE SUPPORT IN SUBSTRATE PROCE...
- Publication number 20210272828
- Publication date Sep 2, 2021
- LAM RESEARCH CORPORATION
- Sairam SUNDARAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH SEAL SURFACE
- Publication number 20210013080
- Publication date Jan 14, 2021
- LAM RESEARCH CORPORATION
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF VOLTAGE AND CURRENT MEASUREMENTS TO CONTROL DUAL ZONE CERAMI...
- Publication number 20200255945
- Publication date Aug 13, 2020
- LAM RESEARCH CORPORATION
- Aaron DURBIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20200227304
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20200219757
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Patrick BREILING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPRESSING INTERFACIAL REACTIONS BY VARYING THE WAFER TEMPERATURE...
- Publication number 20200066607
- Publication date Feb 27, 2020
- LAM RESEARCH CORPORATION
- Seshasayee Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ramesh Chandrasekharan

Person

Patents Grantslast 30 patents

Electrostatic chuck with seal surface

Pedestals for modulating film properties in atomic layer deposition...

Trim and deposition profile control with multi-zone heated substrat...

Progressive heating of components of substrate processing systems u...

Systems and methods for reducing effluent build-up in a pumping exh...

Fill on demand ampoule refill

Substrate processing systems including gas delivery system with red...

Dynamic temperature control of substrate support in substrate proce...

Suppression of parasitic deposition in a substrate processing syste...

Substrate processing systems including gas delivery system with red...

Planar substrate edge contact with open volume equalization pathway...

Systems and methods for reducing effluent build-up in a pumping exh...

Multi zone substrate support for ALD film property correction and t...

Electrostatic chucking pedestal with substrate backside purging and...

Progressive heating of components of substrate processing systems u...

Suppression of parasitic deposition in a substrate processing syste...

Fill on demand ampoule refill

Suppressing interfacial reactions by varying the wafer temperature...

Use of voltage and current measurements to control dual zone cerami...

Deposition apparatus including an isothermal processing zone

Chemical deposition chamber having gas seal

Low volume showerhead with porous baffle

Use of voltage and current measurements to control dual zone cerami...

Planar substrate edge contact with open volume equalization pathway...

Low volume showerhead with faceplate holes for improved flow unifor...

Suppressing interfacial reactions by varying the wafer temperature...

Systems and methods enabling low defect processing via controlled s...

Asymmetric pedestal/carrier ring arrangement for edge impedance mod...

Suppression of parasitic deposition in a substrate processing syste...

Purge and pumping structures arranged beneath substrate plane to re...

Patents Applicationslast 30 patents

APPARATUSES FOR THERMAL MANAGEMENT OF A PEDESTAL AND CHAMBER

FILL ON DEMAND AMPOULE REFILL

USE OF SIGNAL FILTERING SCHEMES IN HIGH TCR BASED CONTROL

BACKSIDE DEPOSITION PREVENTION ON SUBSTRATES

DUAL ZONE HEATERS FOR METALLIC PEDESTALS

SUBSTRATE PROCESSING SYSTEMS INCLUDING GAS DELIVERY SYSTEM WITH RED...

CONCENTRATION CONTROL USING A BUBBLER

INTEGRATION OF VAPOR DEPOSITION PROCESS INTO PLASMA ETCH REACTOR

PHOTOELECTRON ASSISTED PLASMA IGNITION

AUTOMATED FEEDFORWARD AND FEEDBACK SEQUENCE FOR PATTERNING CD CONTROL

HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER

ASYMMETRIC PURGED BLOCK BENEATH WAFER PLANE TO MANAGE NON-UNIFORMITY

USE OF VACUUM DURING TRANSFER OF SUBSTRATES

SYSTEMS AND METHODS FOR REDUCING EFFLUENT BUILD-UP IN A PUMPING EXH...

TEMPERATURE CONTROL OF A MULTI-ZONE PEDESTAL

USE OF ROTATION TO CORRECT FOR AZIMUTHAL NON-UNIFORMITIES IN SEMICO...

INDEPENDENTLY ADJUSTABLE FLOWPATH CONDUCTANCE IN MULTI-STATION SEMI...

RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEM...

TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...

PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...

PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...

MULTILAYER COATINGS OF COMPONENT PARTS FOR A WORK PIECE PROCESSING...

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

FILL ON DEMAND AMPOULE REFILL

DYNAMIC TEMPERATURE CONTROL OF SUBSTRATE SUPPORT IN SUBSTRATE PROCE...

ELECTROSTATIC CHUCK WITH SEAL SURFACE

USE OF VOLTAGE AND CURRENT MEASUREMENTS TO CONTROL DUAL ZONE CERAMI...

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

SUPPRESSING INTERFACIAL REACTIONS BY VARYING THE WAFER TEMPERATURE...