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Ramesh GOPALAN
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Inline measurement of process gas dissociation using infrared absor...
Patent number
11,521,839
Issue date
Dec 6, 2022
Applied Materials, Inc.
Ramesh Gopalan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wireless in-situ real-time measurement of electrostatic chucking fo...
Patent number
11,373,890
Issue date
Jun 28, 2022
Applied Materials, Inc.
Ramesh Gopalan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for monitoring input power for process control...
Patent number
11,355,325
Issue date
Jun 7, 2022
Applied Materials, Inc.
Ramesh Gopalan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate chucking and dechucking methods
Patent number
11,114,326
Issue date
Sep 7, 2021
Applied Materials, Inc.
Wendell Glenn Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protective yttria coating for semiconductor equipment parts
Patent number
11,047,035
Issue date
Jun 29, 2021
Applied Materials, Inc.
Ramesh Gopalan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Measuring concentrations of radicals in semiconductor processing
Patent number
10,685,819
Issue date
Jun 16, 2020
Applied Materials, Inc.
Ramesh Gopalan
G01 - MEASURING TESTING
Information
Patent Grant
Surface acoustic wave sensors in semiconductor processing equipment
Patent number
10,656,100
Issue date
May 19, 2020
Applied Materials, Inc.
Ramesh Gopalan
G01 - MEASURING TESTING
Information
Patent Grant
Chemical mechanical polishing smart ring
Patent number
10,513,008
Issue date
Dec 24, 2019
Applied Materials, Inc.
Zubin Huang
B24 - GRINDING POLISHING
Information
Patent Grant
Surface acoustic wave sensors in semiconductor processing equipment
Patent number
10,094,788
Issue date
Oct 9, 2018
Applied Materials, Inc.
Ramesh Gopalan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for detecting planarization of metal films pri...
Patent number
7,690,966
Issue date
Apr 6, 2010
Lam Research Corporation
Ramesh Gopalan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for detecting planarization of metal films pri...
Patent number
7,413,988
Issue date
Aug 19, 2008
Lam Research Corporation
Ramesh Gopalan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reducing or eliminating de-lamination of semiconductor w...
Patent number
7,040,952
Issue date
May 9, 2006
Lam Research Corporation
Sridharan Srivatsan
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
WIRELESS IN-SITU REAL-TIME MEASUREMENT OF ELECTROSTATIC CHUCKING FO...
Publication number
20220285185
Publication date
Sep 8, 2022
Applied Materials, Inc.
Ramesh Gopalan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR PROCESSING A SUBSTRATE
Publication number
20210375701
Publication date
Dec 2, 2021
Applied Materials, Inc.
Ramesh GOPALAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR MONITORING INPUT POWER FOR PROCESS CONTROL...
Publication number
20210375601
Publication date
Dec 2, 2021
Applied Materials, Inc.
Ramesh GOPALAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INLINE MEASUREMENT OF PROCESS GAS DISSOCIATION USING INFRARED ABSOR...
Publication number
20210159060
Publication date
May 27, 2021
Applied Materials, Inc.
Ramesh GOPALAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Anti-virus filter for facemasks and respirators
Publication number
20210138279
Publication date
May 13, 2021
Ramesh Gopalan
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Self-Regulating Smart Irrigation System
Publication number
20210045286
Publication date
Feb 18, 2021
Ramesh Gopalan
A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information
Patent Application
Smart Cosmetic Applicator
Publication number
20200196937
Publication date
Jun 25, 2020
Ramesh Gopalan
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
WIRELESS IN-SITU REAL-TIME MEASUREMENT OF ELECTROSTATIC CHUCKING FO...
Publication number
20200194290
Publication date
Jun 18, 2020
Applied Materials, Inc.
Ramesh Gopalan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROTECTIVE YTTRIA COATING FOR SEMICONDUCTOR EQUIPMENT PARTS
Publication number
20190264314
Publication date
Aug 29, 2019
Ramesh Gopalan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE CHUCKING AND DECHUCKING METHODS
Publication number
20190206712
Publication date
Jul 4, 2019
Applied Materials, Inc.
Wendell Glenn BOYD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE ACOUSTIC WAVE SENSORS IN SEMICONDUCTOR PROCESSING EQUIPMENT
Publication number
20190137415
Publication date
May 9, 2019
Applied Materials, Inc.
Ramesh GOPALAN
G01 - MEASURING TESTING
Information
Patent Application
MEASURING CONCENTRATIONS OF RADICALS IN SEMICONDUCTOR PROCESSING
Publication number
20180342377
Publication date
Nov 29, 2018
Applied Materials, Inc.
Ramesh GOPALAN
G01 - MEASURING TESTING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING SMART RING
Publication number
20180071889
Publication date
Mar 15, 2018
Applied Materials, Inc.
Zubin HUANG
G01 - MEASURING TESTING
Information
Patent Application
SURFACE ACOUSTIC WAVE SENSORS IN SEMICONDUCTOR PROCESSING EQUIPMENT
Publication number
20170176349
Publication date
Jun 22, 2017
Applied Materials, Inc.
Ramesh GOPALAN
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR REMOVING ALUMINUM FLUORIDE CONTAMINATION FROM SEMICONDUC...
Publication number
20170056935
Publication date
Mar 2, 2017
Applied Materials, Inc.
Ramesh GOPALAN
B08 - CLEANING
Information
Patent Application
SURFACE PROFILE MODIFICATIONS FOR EXTENDED LIFE OF CONSUMABLE PARTS...
Publication number
20160155657
Publication date
Jun 2, 2016
Applied Materials, Inc.
Ramesh GOPALAN
H01 - BASIC ELECTRIC ELEMENTS