Ramkishan Rao Lingampalli

Person

Dublin, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus including metallized-ceramic tubes for radio-frequency an...
- Patent number 10,964,545
- Issue date Mar 30, 2021
- Lam Research Corporation
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Module including metallized ceramic tubes for RF and gas delivery
- Patent number 10,431,467
- Issue date Oct 1, 2019
- Lam Research Corporation
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid ceramic showerhead
- Patent number 10,400,333
- Issue date Sep 3, 2019
- Novellus Systems, Inc.
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic gas distribution plate with embedded electrode
- Patent number 10,217,614
- Issue date Feb 26, 2019
- Lam Research Corporation
- Jeremy Tucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate pedestal module including metallized ceramic tubes for RF...
- Patent number 10,147,610
- Issue date Dec 4, 2018
- Lam Research Corporation
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and apparatus for flowable deposition in semiconductor fabri...
- Patent number 9,719,169
- Issue date Aug 1, 2017
- Novellus Systems, Inc.
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic showerhead with embedded RF electrode for capacitively coup...
- Patent number 9,449,795
- Issue date Sep 20, 2016
- Novellus Systems, Inc.
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid ceramic showerhead
- Patent number 9,441,296
- Issue date Sep 13, 2016
- Novellus Systems, Inc.
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Article for use in a semiconductor processing chamber and method of...
- Patent number 6,632,325
- Issue date Oct 14, 2003
- Applied Materials, Inc.
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck and method for fabricating the same
- Patent number 6,175,485
- Issue date Jan 16, 2001
- Applied Materials, Inc.
- Padmanabhan Krishnaraj
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
RF antenna having high temperature, oxidation resistant coating
- Patent number 5,785,878
- Issue date Jul 28, 1998
- Applied Materials, Inc.
- Ramkishan Rao Lingampalli
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MONOLITHIC ANISOTROPIC SUBSTRATE SUPPORTS
- Publication number 20240128062
- Publication date Apr 18, 2024
- LAM RESEARCH CORPORATION
- Joel HOLLINGSWORTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED CONDUCTOR FOR HEATER EMBEDDED IN CERAMIC
- Publication number 20240023204
- Publication date Jan 18, 2024
- LAM RESEARCH CORPORATION
- Joel Hollingsworth
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER
- Publication number 20230073259
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAMELLAR CERAMIC STRUCTURE
- Publication number 20220181126
- Publication date Jun 9, 2022
- LAM RESEARCH CORPORATION
- Joel Philip Hollingsworth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY
- Publication number 20200051822
- Publication date Feb 13, 2020
- LAM RESEARCH CORPORATION
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY
- Publication number 20190109008
- Publication date Apr 11, 2019
- LAM RESEARCH CORPORATION
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOLITHIC CERAMIC GAS DISTRIBUTION PLATE
- Publication number 20190032211
- Publication date Jan 31, 2019
- LAM RESEARCH CORPORATION
- Jeremy Tucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PEDESTAL MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF...
- Publication number 20180350610
- Publication date Dec 6, 2018
- LAM RESEARCH CORPORATION
- Ramkishan Rao Lingampalli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID CERAMIC SHOWERHEAD
- Publication number 20160348244
- Publication date Dec 1, 2016
- Novellus Systems, Inc.
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC GAS DISTRIBUTION PLATE WITH EMBEDDED ELECTRODE
- Publication number 20160203952
- Publication date Jul 14, 2016
- LAM RESEARCH CORPORATION
- Jeremy Tucker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUP...
- Publication number 20140238608
- Publication date Aug 28, 2014
- Novellus Systems, Inc.
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYBRID CERAMIC SHOWERHEAD
- Publication number 20120222815
- Publication date Sep 6, 2012
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND APPARATUS FOR FLOWABLE DEPOSITION IN SEMICONDUCTOR FABRI...
- Publication number 20120161405
- Publication date Jun 28, 2012
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARTICLE FOR USE IN A SEMICONDUCTOR PROCESSING CHAMBER AND METHOD OF...
- Publication number 20030148035
- Publication date Aug 7, 2003
- APPLIED MATERIALS, INC.
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ramkishan Rao Lingampalli

Person

Patents Grantslast 30 patents

Apparatus including metallized-ceramic tubes for radio-frequency an...

Module including metallized ceramic tubes for RF and gas delivery

Hybrid ceramic showerhead

Ceramic gas distribution plate with embedded electrode

Substrate pedestal module including metallized ceramic tubes for RF...

System and apparatus for flowable deposition in semiconductor fabri...

Ceramic showerhead with embedded RF electrode for capacitively coup...

Hybrid ceramic showerhead

Article for use in a semiconductor processing chamber and method of...

Electrostatic chuck and method for fabricating the same

RF antenna having high temperature, oxidation resistant coating

Patents Applicationslast 30 patents

MONOLITHIC ANISOTROPIC SUBSTRATE SUPPORTS

COATED CONDUCTOR FOR HEATER EMBEDDED IN CERAMIC

HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER

LAMELLAR CERAMIC STRUCTURE

MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY

MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY

MONOLITHIC CERAMIC GAS DISTRIBUTION PLATE

SUBSTRATE PEDESTAL MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF...

HYBRID CERAMIC SHOWERHEAD

CERAMIC GAS DISTRIBUTION PLATE WITH EMBEDDED ELECTRODE

CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUP...

HYBRID CERAMIC SHOWERHEAD

SYSTEM AND APPARATUS FOR FLOWABLE DEPOSITION IN SEMICONDUCTOR FABRI...

ARTICLE FOR USE IN A SEMICONDUCTOR PROCESSING CHAMBER AND METHOD OF...