Ramkumar Karur-Shanmugam

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for field-by-field overlay process control using...
- Patent number 10,466,596
- Issue date Nov 5, 2019
- KLA-Tencor Corporation
- Bill Pierson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for automated multi-zone detection and modeling
- Patent number 10,340,165
- Issue date Jul 2, 2019
- KLA-Tencor Corporation
- Jeremy Nabeth
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Systems and Methods for Automated Multi-Zone Detection and Modeling
- Publication number 20170287754
- Publication date Oct 5, 2017
- KLA-Tencor Corporation
- Jeremy Nabeth
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Field-By-Field Overlay Process Control Using...
- Publication number 20150241790
- Publication date Aug 27, 2015
- KLA-Tencor Corporation
- Bill Pierson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY