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Ramkumar SUBRAMANIAN
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of tungsten etching
Patent number
RE47650
Issue date
Oct 15, 2019
Lam Research Corporation
Ramkumar Subramanian
Information
Patent Grant
System and method for detecting a process point in multi-mode pulse...
Patent number
10,242,849
Issue date
Mar 26, 2019
Lam Research Corporation
Yassine Kabouzi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for detecting a process point in multi-mode pulse...
Patent number
9,640,371
Issue date
May 2, 2017
Lam Research Corporation
Yassine Kabouzi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of tungsten etching
Patent number
9,230,825
Issue date
Jan 5, 2016
Lam Research Corporation
Ramkumar Subramanian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING A PROCESS POINT IN MULT-MODE PULSE...
Publication number
20170207070
Publication date
Jul 20, 2017
LAM RESEARCH CORPORATION
Yassine Kabouzi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Detecting a Process Point in Multi-Mode Pulse...
Publication number
20160111261
Publication date
Apr 21, 2016
LAM RESEARCH CORPORATION
Yassine Kabouzi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF TUNGSTEN ETCHING
Publication number
20140120727
Publication date
May 1, 2014
Ramkumar SUBRAMANIAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...