Ramkumar Subramanian

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Fremont, IN

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Patents Grantslast 30 patents

Information Patent Grant
In-situ generation of the molecular etcher carbonyl fluoride or any...
- Patent number 8,932,406
- Issue date Jan 13, 2015
- Matheson Tri-Gas, Inc.
- Glenn Mitchell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
IN-SITU GENERATION OF THE MOLECULAR ETCHER CARBONYL FLUORIDE OR ANY...
- Publication number 20140060571
- Publication date Mar 6, 2014
- Matheson Tri-Gas, Inc.
- Glenn Mitchell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU TCO CHAMBER CLEAN
- Publication number 20140060574
- Publication date Mar 6, 2014
- Matheson Tri-Gas
- Carrie Wyse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...